2/4/2011	12:04:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	12:04:03 AM	Recipe started at 12:04 AM
2/4/2011	12:04:03 AM	H2 valve closed
2/4/2011	12:04:03 AM	BCl3 valve closed
2/4/2011	12:04:03 AM	PH3 valve closed
2/4/2011	12:04:03 AM	SiCl4 pre valve closed
2/4/2011	12:04:03 AM	SiCl4 post valve closed
2/4/2011	12:04:03 AM	Main Vac valve closed
2/4/2011	12:04:03 AM	Bypass valve closed
2/4/2011	12:04:03 AM	Bubbler valve closed
2/4/2011	12:04:03 AM	Helium valve opened
2/4/2011	12:04:03 AM	Helium MFC set to  500.000000
2/4/2011	12:04:03 AM	H2 MFC set to  0.000000
2/4/2011	12:04:03 AM	BCl3 MFC set to  0.000000
2/4/2011	12:04:03 AM	PHl3 MFC set to  0.000000
2/4/2011	12:04:03 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:04:03 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:04:03 AM	Tube furnace set to 0
2/4/2011	12:05:21 AM	Helium valve closed
2/4/2011	12:05:21 AM	H2 valve closed
2/4/2011	12:05:21 AM	BCl3 valve closed
2/4/2011	12:05:21 AM	PH3 valve closed
2/4/2011	12:05:21 AM	SiCl4 pre valve closed
2/4/2011	12:05:21 AM	SiCl4 post valve closed
2/4/2011	12:05:21 AM	Main Vac valve closed
2/4/2011	12:05:21 AM	Bypass valve closed
2/4/2011	12:05:21 AM	Bubbler valve closed
2/4/2011	12:05:21 AM	Helium MFC set to  0.000000
2/4/2011	12:05:21 AM	H2 MFC set to  0.000000
2/4/2011	12:05:21 AM	BCl3 MFC set to  0.000000
2/4/2011	12:05:21 AM	PHl3 MFC set to  0.000000
2/4/2011	12:05:21 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:05:21 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:05:21 AM	Tube furnace set to 0
2/4/2011	12:05:21 AM	Run finished at 12:05 AM
2/4/2011	12:05:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	12:14:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	12:14:40 AM	Recipe started at 12:14 AM
2/4/2011	12:14:40 AM	Helium valve closed
2/4/2011	12:14:40 AM	H2 valve closed
2/4/2011	12:14:40 AM	BCl3 valve closed
2/4/2011	12:14:40 AM	PH3 valve closed
2/4/2011	12:14:40 AM	SiCl4 pre valve closed
2/4/2011	12:14:40 AM	SiCl4 post valve closed
2/4/2011	12:14:40 AM	Main Vac valve closed
2/4/2011	12:14:40 AM	Bubbler valve closed
2/4/2011	12:14:40 AM	Bypass valve opened
2/4/2011	12:14:40 AM	Helium MFC set to  0.000000
2/4/2011	12:14:40 AM	H2 MFC set to  0.000000
2/4/2011	12:14:40 AM	BCl3 MFC set to  0.000000
2/4/2011	12:14:40 AM	PHl3 MFC set to  0.000000
2/4/2011	12:14:40 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:14:40 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:14:40 AM	Tube furnace set to 0
2/4/2011	12:15:12 AM	Helium valve closed
2/4/2011	12:15:12 AM	H2 valve closed
2/4/2011	12:15:12 AM	BCl3 valve closed
2/4/2011	12:15:12 AM	PH3 valve closed
2/4/2011	12:15:12 AM	SiCl4 pre valve closed
2/4/2011	12:15:12 AM	SiCl4 post valve closed
2/4/2011	12:15:12 AM	Bubbler valve closed
2/4/2011	12:15:12 AM	Main Vac valve opened
2/4/2011	12:15:12 AM	Bypass valve opened
2/4/2011	12:15:12 AM	Helium MFC set to  0.000000
2/4/2011	12:15:12 AM	H2 MFC set to  0.000000
2/4/2011	12:15:12 AM	BCl3 MFC set to  0.000000
2/4/2011	12:15:12 AM	PHl3 MFC set to  0.000000
2/4/2011	12:15:12 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:15:12 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:15:12 AM	Tube furnace set to 0
2/4/2011	12:15:12 AM	Run finished at 12:15 AM
2/4/2011	12:15:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	12:30:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	12:30:18 AM	Recipe started at 12:30 AM
2/4/2011	12:30:18 AM	H2 valve closed
2/4/2011	12:30:18 AM	BCl3 valve closed
2/4/2011	12:30:18 AM	PH3 valve closed
2/4/2011	12:30:18 AM	SiCl4 pre valve closed
2/4/2011	12:30:18 AM	SiCl4 post valve closed
2/4/2011	12:30:18 AM	Main Vac valve closed
2/4/2011	12:30:18 AM	Bypass valve closed
2/4/2011	12:30:18 AM	Bubbler valve closed
2/4/2011	12:30:18 AM	Helium valve opened
2/4/2011	12:30:18 AM	Helium MFC set to  500.000000
2/4/2011	12:30:18 AM	H2 MFC set to  0.000000
2/4/2011	12:30:18 AM	BCl3 MFC set to  0.000000
2/4/2011	12:30:18 AM	PHl3 MFC set to  0.000000
2/4/2011	12:30:18 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:30:18 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:30:18 AM	Tube furnace set to 0
2/4/2011	12:31:33 AM	Helium valve closed
2/4/2011	12:31:33 AM	H2 valve closed
2/4/2011	12:31:33 AM	BCl3 valve closed
2/4/2011	12:31:33 AM	PH3 valve closed
2/4/2011	12:31:33 AM	SiCl4 pre valve closed
2/4/2011	12:31:33 AM	SiCl4 post valve closed
2/4/2011	12:31:33 AM	Main Vac valve closed
2/4/2011	12:31:33 AM	Bypass valve closed
2/4/2011	12:31:33 AM	Bubbler valve closed
2/4/2011	12:31:33 AM	Helium MFC set to  0.000000
2/4/2011	12:31:33 AM	H2 MFC set to  0.000000
2/4/2011	12:31:33 AM	BCl3 MFC set to  0.000000
2/4/2011	12:31:33 AM	PHl3 MFC set to  0.000000
2/4/2011	12:31:33 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:31:33 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:31:33 AM	Tube furnace set to 0
2/4/2011	12:31:33 AM	Run finished at 12:31 AM
2/4/2011	12:31:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	12:37:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	12:37:52 AM	Recipe started at 12:37 AM
2/4/2011	12:37:53 AM	Helium valve closed
2/4/2011	12:37:53 AM	H2 valve closed
2/4/2011	12:37:53 AM	BCl3 valve closed
2/4/2011	12:37:53 AM	PH3 valve closed
2/4/2011	12:37:53 AM	SiCl4 pre valve closed
2/4/2011	12:37:53 AM	SiCl4 post valve closed
2/4/2011	12:37:53 AM	Main Vac valve closed
2/4/2011	12:37:53 AM	Bubbler valve closed
2/4/2011	12:37:53 AM	Bypass valve opened
2/4/2011	12:37:53 AM	Helium MFC set to  0.000000
2/4/2011	12:37:53 AM	H2 MFC set to  0.000000
2/4/2011	12:37:53 AM	BCl3 MFC set to  0.000000
2/4/2011	12:37:53 AM	PHl3 MFC set to  0.000000
2/4/2011	12:37:53 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:37:53 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:37:53 AM	Tube furnace set to 0
2/4/2011	12:38:23 AM	Helium valve closed
2/4/2011	12:38:23 AM	H2 valve closed
2/4/2011	12:38:23 AM	BCl3 valve closed
2/4/2011	12:38:23 AM	PH3 valve closed
2/4/2011	12:38:23 AM	SiCl4 pre valve closed
2/4/2011	12:38:23 AM	SiCl4 post valve closed
2/4/2011	12:38:23 AM	Bubbler valve closed
2/4/2011	12:38:23 AM	Main Vac valve opened
2/4/2011	12:38:23 AM	Bypass valve opened
2/4/2011	12:38:23 AM	Helium MFC set to  0.000000
2/4/2011	12:38:23 AM	H2 MFC set to  0.000000
2/4/2011	12:38:23 AM	BCl3 MFC set to  0.000000
2/4/2011	12:38:23 AM	PHl3 MFC set to  0.000000
2/4/2011	12:38:23 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:38:23 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:38:24 AM	Tube furnace set to 0
2/4/2011	12:38:24 AM	Run finished at 12:38 AM
2/4/2011	12:38:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	12:38:30 AM	Tube furnace set to 200
2/4/2011	12:40:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/4/2011	12:40:23 AM	Recipe started at 12:40 AM
2/4/2011	12:40:23 AM	Helium valve closed
2/4/2011	12:40:23 AM	H2 valve closed
2/4/2011	12:40:23 AM	BCl3 valve closed
2/4/2011	12:40:23 AM	PH3 valve closed
2/4/2011	12:40:23 AM	SiCl4 pre valve closed
2/4/2011	12:40:23 AM	SiCl4 post valve closed
2/4/2011	12:40:23 AM	Main Vac valve closed
2/4/2011	12:40:23 AM	Bubbler valve closed
2/4/2011	12:40:23 AM	Bypass valve opened
2/4/2011	12:40:23 AM	Helium MFC set to  0.000000
2/4/2011	12:40:23 AM	H2 MFC set to  0.000000
2/4/2011	12:40:23 AM	BCl3 MFC set to  0.000000
2/4/2011	12:40:23 AM	PHl3 MFC set to  0.000000
2/4/2011	12:40:23 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:40:23 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:40:23 AM	Tube furnace set to 0
2/4/2011	12:40:23 AM	Helium valve closed
2/4/2011	12:40:23 AM	H2 valve closed
2/4/2011	12:40:23 AM	BCl3 valve closed
2/4/2011	12:40:23 AM	PH3 valve closed
2/4/2011	12:40:23 AM	SiCl4 pre valve closed
2/4/2011	12:40:23 AM	SiCl4 post valve closed
2/4/2011	12:40:23 AM	Bubbler valve closed
2/4/2011	12:40:23 AM	Main Vac valve opened
2/4/2011	12:40:23 AM	Bypass valve opened
2/4/2011	12:40:23 AM	Helium MFC set to  0.000000
2/4/2011	12:40:23 AM	H2 MFC set to  0.000000
2/4/2011	12:40:23 AM	BCl3 MFC set to  0.000000
2/4/2011	12:40:23 AM	PHl3 MFC set to  0.000000
2/4/2011	12:40:23 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:40:23 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:40:24 AM	Tube furnace set to 0
2/4/2011	12:41:24 AM	H2 valve closed
2/4/2011	12:41:24 AM	BCl3 valve closed
2/4/2011	12:41:24 AM	PH3 valve closed
2/4/2011	12:41:24 AM	SiCl4 pre valve closed
2/4/2011	12:41:24 AM	SiCl4 post valve closed
2/4/2011	12:41:24 AM	Bubbler valve closed
2/4/2011	12:41:24 AM	Helium valve opened
2/4/2011	12:41:24 AM	Main Vac valve opened
2/4/2011	12:41:24 AM	Bypass valve opened
2/4/2011	12:41:24 AM	Helium MFC set to  100.000000
2/4/2011	12:41:24 AM	H2 MFC set to  0.000000
2/4/2011	12:41:24 AM	BCl3 MFC set to  0.000000
2/4/2011	12:41:24 AM	PHl3 MFC set to  0.000000
2/4/2011	12:41:24 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:41:24 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:41:24 AM	Tube furnace set to 0
2/4/2011	12:42:24 AM	Helium valve closed
2/4/2011	12:42:24 AM	H2 valve closed
2/4/2011	12:42:24 AM	BCl3 valve closed
2/4/2011	12:42:24 AM	PH3 valve closed
2/4/2011	12:42:24 AM	SiCl4 pre valve closed
2/4/2011	12:42:24 AM	SiCl4 post valve closed
2/4/2011	12:42:24 AM	Bubbler valve closed
2/4/2011	12:42:24 AM	Main Vac valve opened
2/4/2011	12:42:24 AM	Bypass valve opened
2/4/2011	12:42:24 AM	Helium MFC set to  0.000000
2/4/2011	12:42:24 AM	H2 MFC set to  0.000000
2/4/2011	12:42:24 AM	BCl3 MFC set to  0.000000
2/4/2011	12:42:24 AM	PHl3 MFC set to  0.000000
2/4/2011	12:42:24 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:42:24 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:42:24 AM	Tube furnace set to 0
2/4/2011	12:43:24 AM	H2 valve closed
2/4/2011	12:43:24 AM	BCl3 valve closed
2/4/2011	12:43:24 AM	PH3 valve closed
2/4/2011	12:43:24 AM	SiCl4 pre valve closed
2/4/2011	12:43:24 AM	SiCl4 post valve closed
2/4/2011	12:43:24 AM	Bubbler valve closed
2/4/2011	12:43:24 AM	Helium valve opened
2/4/2011	12:43:24 AM	Main Vac valve opened
2/4/2011	12:43:24 AM	Bypass valve opened
2/4/2011	12:43:24 AM	Helium MFC set to  100.000000
2/4/2011	12:43:24 AM	H2 MFC set to  0.000000
2/4/2011	12:43:24 AM	BCl3 MFC set to  0.000000
2/4/2011	12:43:24 AM	PHl3 MFC set to  0.000000
2/4/2011	12:43:24 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:43:24 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:43:24 AM	Tube furnace set to 0
2/4/2011	12:44:24 AM	Helium valve closed
2/4/2011	12:44:24 AM	H2 valve closed
2/4/2011	12:44:24 AM	BCl3 valve closed
2/4/2011	12:44:24 AM	PH3 valve closed
2/4/2011	12:44:24 AM	SiCl4 pre valve closed
2/4/2011	12:44:24 AM	SiCl4 post valve closed
2/4/2011	12:44:24 AM	Bubbler valve closed
2/4/2011	12:44:24 AM	Main Vac valve opened
2/4/2011	12:44:24 AM	Bypass valve opened
2/4/2011	12:44:24 AM	Helium MFC set to  0.000000
2/4/2011	12:44:24 AM	H2 MFC set to  0.000000
2/4/2011	12:44:24 AM	BCl3 MFC set to  0.000000
2/4/2011	12:44:24 AM	PHl3 MFC set to  0.000000
2/4/2011	12:44:24 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:44:24 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:44:24 AM	Tube furnace set to 0
2/4/2011	12:45:24 AM	H2 valve closed
2/4/2011	12:45:24 AM	BCl3 valve closed
2/4/2011	12:45:24 AM	PH3 valve closed
2/4/2011	12:45:24 AM	SiCl4 pre valve closed
2/4/2011	12:45:24 AM	SiCl4 post valve closed
2/4/2011	12:45:24 AM	Bubbler valve closed
2/4/2011	12:45:24 AM	Helium valve opened
2/4/2011	12:45:24 AM	Main Vac valve opened
2/4/2011	12:45:24 AM	Bypass valve opened
2/4/2011	12:45:24 AM	Helium MFC set to  100.000000
2/4/2011	12:45:24 AM	H2 MFC set to  0.000000
2/4/2011	12:45:24 AM	BCl3 MFC set to  0.000000
2/4/2011	12:45:24 AM	PHl3 MFC set to  0.000000
2/4/2011	12:45:24 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:45:24 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:45:25 AM	Tube furnace set to 0
2/4/2011	12:46:25 AM	Helium valve closed
2/4/2011	12:46:25 AM	H2 valve closed
2/4/2011	12:46:25 AM	BCl3 valve closed
2/4/2011	12:46:25 AM	PH3 valve closed
2/4/2011	12:46:25 AM	SiCl4 pre valve closed
2/4/2011	12:46:25 AM	SiCl4 post valve closed
2/4/2011	12:46:25 AM	Bubbler valve closed
2/4/2011	12:46:25 AM	Main Vac valve opened
2/4/2011	12:46:25 AM	Bypass valve opened
2/4/2011	12:46:25 AM	Helium MFC set to  0.000000
2/4/2011	12:46:25 AM	H2 MFC set to  0.000000
2/4/2011	12:46:25 AM	BCl3 MFC set to  0.000000
2/4/2011	12:46:25 AM	PHl3 MFC set to  0.000000
2/4/2011	12:46:25 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:46:25 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:46:25 AM	Tube furnace set to 0
2/4/2011	12:47:25 AM	H2 valve closed
2/4/2011	12:47:25 AM	BCl3 valve closed
2/4/2011	12:47:25 AM	PH3 valve closed
2/4/2011	12:47:25 AM	SiCl4 pre valve closed
2/4/2011	12:47:25 AM	SiCl4 post valve closed
2/4/2011	12:47:25 AM	Bubbler valve closed
2/4/2011	12:47:25 AM	Helium valve opened
2/4/2011	12:47:25 AM	Main Vac valve opened
2/4/2011	12:47:25 AM	Bypass valve opened
2/4/2011	12:47:25 AM	Helium MFC set to  100.000000
2/4/2011	12:47:25 AM	H2 MFC set to  0.000000
2/4/2011	12:47:25 AM	BCl3 MFC set to  0.000000
2/4/2011	12:47:25 AM	PHl3 MFC set to  0.000000
2/4/2011	12:47:25 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:47:25 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:47:25 AM	Tube furnace set to 0
2/4/2011	12:48:25 AM	Helium valve closed
2/4/2011	12:48:25 AM	H2 valve closed
2/4/2011	12:48:25 AM	BCl3 valve closed
2/4/2011	12:48:25 AM	PH3 valve closed
2/4/2011	12:48:25 AM	SiCl4 pre valve closed
2/4/2011	12:48:25 AM	SiCl4 post valve closed
2/4/2011	12:48:25 AM	Bubbler valve closed
2/4/2011	12:48:25 AM	Main Vac valve opened
2/4/2011	12:48:25 AM	Bypass valve opened
2/4/2011	12:48:25 AM	Helium MFC set to  0.000000
2/4/2011	12:48:25 AM	H2 MFC set to  0.000000
2/4/2011	12:48:25 AM	BCl3 MFC set to  0.000000
2/4/2011	12:48:25 AM	PHl3 MFC set to  0.000000
2/4/2011	12:48:25 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:48:25 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:48:25 AM	Tube furnace set to 0
2/4/2011	12:49:25 AM	H2 valve closed
2/4/2011	12:49:25 AM	BCl3 valve closed
2/4/2011	12:49:25 AM	PH3 valve closed
2/4/2011	12:49:25 AM	SiCl4 pre valve closed
2/4/2011	12:49:25 AM	SiCl4 post valve closed
2/4/2011	12:49:25 AM	Bubbler valve closed
2/4/2011	12:49:25 AM	Helium valve opened
2/4/2011	12:49:25 AM	Main Vac valve opened
2/4/2011	12:49:25 AM	Bypass valve opened
2/4/2011	12:49:25 AM	Helium MFC set to  100.000000
2/4/2011	12:49:25 AM	H2 MFC set to  0.000000
2/4/2011	12:49:25 AM	BCl3 MFC set to  0.000000
2/4/2011	12:49:25 AM	PHl3 MFC set to  0.000000
2/4/2011	12:49:25 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:49:25 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:49:25 AM	Tube furnace set to 0
2/4/2011	12:50:25 AM	Helium valve closed
2/4/2011	12:50:25 AM	H2 valve closed
2/4/2011	12:50:25 AM	BCl3 valve closed
2/4/2011	12:50:25 AM	PH3 valve closed
2/4/2011	12:50:25 AM	SiCl4 pre valve closed
2/4/2011	12:50:25 AM	SiCl4 post valve closed
2/4/2011	12:50:25 AM	Bubbler valve closed
2/4/2011	12:50:25 AM	Main Vac valve opened
2/4/2011	12:50:25 AM	Bypass valve opened
2/4/2011	12:50:25 AM	Helium MFC set to  0.000000
2/4/2011	12:50:25 AM	H2 MFC set to  0.000000
2/4/2011	12:50:25 AM	BCl3 MFC set to  0.000000
2/4/2011	12:50:25 AM	PHl3 MFC set to  0.000000
2/4/2011	12:50:25 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:50:25 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:50:26 AM	Tube furnace set to 0
2/4/2011	12:51:26 AM	H2 valve closed
2/4/2011	12:51:26 AM	BCl3 valve closed
2/4/2011	12:51:26 AM	PH3 valve closed
2/4/2011	12:51:26 AM	SiCl4 pre valve closed
2/4/2011	12:51:26 AM	SiCl4 post valve closed
2/4/2011	12:51:26 AM	Bubbler valve closed
2/4/2011	12:51:26 AM	Helium valve opened
2/4/2011	12:51:26 AM	Main Vac valve opened
2/4/2011	12:51:26 AM	Bypass valve opened
2/4/2011	12:51:26 AM	Helium MFC set to  100.000000
2/4/2011	12:51:26 AM	H2 MFC set to  0.000000
2/4/2011	12:51:26 AM	BCl3 MFC set to  0.000000
2/4/2011	12:51:26 AM	PHl3 MFC set to  0.000000
2/4/2011	12:51:26 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:51:26 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:51:26 AM	Tube furnace set to 0
2/4/2011	12:52:26 AM	Helium valve closed
2/4/2011	12:52:26 AM	H2 valve closed
2/4/2011	12:52:26 AM	BCl3 valve closed
2/4/2011	12:52:26 AM	PH3 valve closed
2/4/2011	12:52:26 AM	SiCl4 pre valve closed
2/4/2011	12:52:26 AM	SiCl4 post valve closed
2/4/2011	12:52:26 AM	Bubbler valve closed
2/4/2011	12:52:26 AM	Main Vac valve opened
2/4/2011	12:52:26 AM	Bypass valve opened
2/4/2011	12:52:26 AM	Helium MFC set to  0.000000
2/4/2011	12:52:26 AM	H2 MFC set to  0.000000
2/4/2011	12:52:26 AM	BCl3 MFC set to  0.000000
2/4/2011	12:52:26 AM	PHl3 MFC set to  0.000000
2/4/2011	12:52:26 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:52:26 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:52:26 AM	Tube furnace set to 0
2/4/2011	12:53:26 AM	H2 valve closed
2/4/2011	12:53:26 AM	BCl3 valve closed
2/4/2011	12:53:26 AM	PH3 valve closed
2/4/2011	12:53:26 AM	SiCl4 pre valve closed
2/4/2011	12:53:26 AM	SiCl4 post valve closed
2/4/2011	12:53:26 AM	Bubbler valve closed
2/4/2011	12:53:26 AM	Helium valve opened
2/4/2011	12:53:26 AM	Main Vac valve opened
2/4/2011	12:53:26 AM	Bypass valve opened
2/4/2011	12:53:26 AM	Helium MFC set to  100.000000
2/4/2011	12:53:26 AM	H2 MFC set to  0.000000
2/4/2011	12:53:26 AM	BCl3 MFC set to  0.000000
2/4/2011	12:53:26 AM	PHl3 MFC set to  0.000000
2/4/2011	12:53:26 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:53:26 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:53:26 AM	Tube furnace set to 0
2/4/2011	12:54:26 AM	Helium valve closed
2/4/2011	12:54:26 AM	H2 valve closed
2/4/2011	12:54:26 AM	BCl3 valve closed
2/4/2011	12:54:26 AM	PH3 valve closed
2/4/2011	12:54:26 AM	SiCl4 pre valve closed
2/4/2011	12:54:26 AM	SiCl4 post valve closed
2/4/2011	12:54:26 AM	Bubbler valve closed
2/4/2011	12:54:26 AM	Main Vac valve opened
2/4/2011	12:54:26 AM	Bypass valve opened
2/4/2011	12:54:26 AM	Helium MFC set to  0.000000
2/4/2011	12:54:26 AM	H2 MFC set to  0.000000
2/4/2011	12:54:26 AM	BCl3 MFC set to  0.000000
2/4/2011	12:54:26 AM	PHl3 MFC set to  0.000000
2/4/2011	12:54:26 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:54:26 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:54:26 AM	Tube furnace set to 0
2/4/2011	12:55:26 AM	H2 valve closed
2/4/2011	12:55:26 AM	BCl3 valve closed
2/4/2011	12:55:26 AM	PH3 valve closed
2/4/2011	12:55:26 AM	SiCl4 pre valve closed
2/4/2011	12:55:26 AM	SiCl4 post valve closed
2/4/2011	12:55:26 AM	Bubbler valve closed
2/4/2011	12:55:26 AM	Helium valve opened
2/4/2011	12:55:26 AM	Main Vac valve opened
2/4/2011	12:55:26 AM	Bypass valve opened
2/4/2011	12:55:26 AM	Helium MFC set to  100.000000
2/4/2011	12:55:26 AM	H2 MFC set to  0.000000
2/4/2011	12:55:26 AM	BCl3 MFC set to  0.000000
2/4/2011	12:55:26 AM	PHl3 MFC set to  0.000000
2/4/2011	12:55:26 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:55:26 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:55:27 AM	Tube furnace set to 0
2/4/2011	12:56:27 AM	Helium valve closed
2/4/2011	12:56:27 AM	H2 valve closed
2/4/2011	12:56:27 AM	BCl3 valve closed
2/4/2011	12:56:27 AM	PH3 valve closed
2/4/2011	12:56:27 AM	SiCl4 pre valve closed
2/4/2011	12:56:27 AM	SiCl4 post valve closed
2/4/2011	12:56:27 AM	Bubbler valve closed
2/4/2011	12:56:27 AM	Main Vac valve opened
2/4/2011	12:56:27 AM	Bypass valve opened
2/4/2011	12:56:27 AM	Helium MFC set to  0.000000
2/4/2011	12:56:27 AM	H2 MFC set to  0.000000
2/4/2011	12:56:27 AM	BCl3 MFC set to  0.000000
2/4/2011	12:56:27 AM	PHl3 MFC set to  0.000000
2/4/2011	12:56:27 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:56:27 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:56:27 AM	Tube furnace set to 0
2/4/2011	12:57:27 AM	H2 valve closed
2/4/2011	12:57:27 AM	BCl3 valve closed
2/4/2011	12:57:27 AM	PH3 valve closed
2/4/2011	12:57:27 AM	SiCl4 pre valve closed
2/4/2011	12:57:27 AM	SiCl4 post valve closed
2/4/2011	12:57:27 AM	Bubbler valve closed
2/4/2011	12:57:27 AM	Helium valve opened
2/4/2011	12:57:27 AM	Main Vac valve opened
2/4/2011	12:57:27 AM	Bypass valve opened
2/4/2011	12:57:27 AM	Helium MFC set to  100.000000
2/4/2011	12:57:27 AM	H2 MFC set to  0.000000
2/4/2011	12:57:27 AM	BCl3 MFC set to  0.000000
2/4/2011	12:57:27 AM	PHl3 MFC set to  0.000000
2/4/2011	12:57:27 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:57:27 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:57:27 AM	Tube furnace set to 0
2/4/2011	12:58:27 AM	Helium valve closed
2/4/2011	12:58:27 AM	H2 valve closed
2/4/2011	12:58:27 AM	BCl3 valve closed
2/4/2011	12:58:27 AM	PH3 valve closed
2/4/2011	12:58:27 AM	SiCl4 pre valve closed
2/4/2011	12:58:27 AM	SiCl4 post valve closed
2/4/2011	12:58:27 AM	Bubbler valve closed
2/4/2011	12:58:27 AM	Main Vac valve opened
2/4/2011	12:58:27 AM	Bypass valve opened
2/4/2011	12:58:27 AM	Helium MFC set to  0.000000
2/4/2011	12:58:27 AM	H2 MFC set to  0.000000
2/4/2011	12:58:27 AM	BCl3 MFC set to  0.000000
2/4/2011	12:58:27 AM	PHl3 MFC set to  0.000000
2/4/2011	12:58:27 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:58:27 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:58:27 AM	Tube furnace set to 0
2/4/2011	12:59:27 AM	H2 valve closed
2/4/2011	12:59:27 AM	BCl3 valve closed
2/4/2011	12:59:27 AM	PH3 valve closed
2/4/2011	12:59:27 AM	SiCl4 pre valve closed
2/4/2011	12:59:27 AM	SiCl4 post valve closed
2/4/2011	12:59:27 AM	Bubbler valve closed
2/4/2011	12:59:27 AM	Helium valve opened
2/4/2011	12:59:27 AM	Main Vac valve opened
2/4/2011	12:59:27 AM	Bypass valve opened
2/4/2011	12:59:27 AM	Helium MFC set to  100.000000
2/4/2011	12:59:27 AM	H2 MFC set to  0.000000
2/4/2011	12:59:27 AM	BCl3 MFC set to  0.000000
2/4/2011	12:59:27 AM	PHl3 MFC set to  0.000000
2/4/2011	12:59:27 AM	SiCl4 MFC set to  0.000000
2/4/2011	12:59:27 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:59:28 AM	Tube furnace set to 0
2/4/2011	1:00:28 AM	Helium valve closed
2/4/2011	1:00:28 AM	H2 valve closed
2/4/2011	1:00:28 AM	BCl3 valve closed
2/4/2011	1:00:28 AM	PH3 valve closed
2/4/2011	1:00:28 AM	SiCl4 pre valve closed
2/4/2011	1:00:28 AM	SiCl4 post valve closed
2/4/2011	1:00:28 AM	Bubbler valve closed
2/4/2011	1:00:28 AM	Main Vac valve opened
2/4/2011	1:00:28 AM	Bypass valve opened
2/4/2011	1:00:28 AM	Helium MFC set to  0.000000
2/4/2011	1:00:28 AM	H2 MFC set to  0.000000
2/4/2011	1:00:28 AM	BCl3 MFC set to  0.000000
2/4/2011	1:00:28 AM	PHl3 MFC set to  0.000000
2/4/2011	1:00:28 AM	SiCl4 MFC set to  0.000000
2/4/2011	1:00:28 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:00:28 AM	Tube furnace set to 0
2/4/2011	1:00:29 AM	Run finished at 1:00 AM
2/4/2011	1:00:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/4/2011	1:01:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/4/2011	1:01:17 AM	Recipe started at 1:01 AM
2/4/2011	1:01:17 AM	Helium valve closed
2/4/2011	1:01:17 AM	H2 valve closed
2/4/2011	1:01:17 AM	BCl3 valve closed
2/4/2011	1:01:17 AM	PH3 valve closed
2/4/2011	1:01:17 AM	SiCl4 pre valve closed
2/4/2011	1:01:17 AM	SiCl4 post valve closed
2/4/2011	1:01:17 AM	Main Vac valve closed
2/4/2011	1:01:17 AM	Bypass valve closed
2/4/2011	1:01:17 AM	Bubbler valve closed
2/4/2011	1:01:17 AM	Helium MFC set to  0.000000
2/4/2011	1:01:17 AM	H2 MFC set to  0.000000
2/4/2011	1:01:17 AM	BCl3 MFC set to  0.000000
2/4/2011	1:01:17 AM	PHl3 MFC set to  0.000000
2/4/2011	1:01:17 AM	SiCl4 MFC set to  0.000000
2/4/2011	1:01:17 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:01:18 AM	Tube furnace set to 0
2/4/2011	1:01:18 AM	Run finished at 1:01 AM
2/4/2011	1:01:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/4/2011	1:01:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	1:01:32 AM	Recipe started at 1:01 AM
2/4/2011	1:01:32 AM	Helium valve closed
2/4/2011	1:01:32 AM	H2 valve closed
2/4/2011	1:01:32 AM	BCl3 valve closed
2/4/2011	1:01:32 AM	PH3 valve closed
2/4/2011	1:01:32 AM	SiCl4 pre valve closed
2/4/2011	1:01:32 AM	SiCl4 post valve closed
2/4/2011	1:01:32 AM	Main Vac valve closed
2/4/2011	1:01:32 AM	Bubbler valve closed
2/4/2011	1:01:32 AM	Bypass valve opened
2/4/2011	1:01:32 AM	Helium MFC set to  0.000000
2/4/2011	1:01:32 AM	H2 MFC set to  0.000000
2/4/2011	1:01:32 AM	BCl3 MFC set to  0.000000
2/4/2011	1:01:32 AM	PHl3 MFC set to  0.000000
2/4/2011	1:01:32 AM	SiCl4 MFC set to  0.000000
2/4/2011	1:01:32 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:01:32 AM	Tube furnace set to 0
2/4/2011	1:01:32 AM	Helium valve closed
2/4/2011	1:01:32 AM	H2 valve closed
2/4/2011	1:01:32 AM	BCl3 valve closed
2/4/2011	1:01:32 AM	PH3 valve closed
2/4/2011	1:01:32 AM	SiCl4 pre valve closed
2/4/2011	1:01:32 AM	SiCl4 post valve closed
2/4/2011	1:01:32 AM	Bubbler valve closed
2/4/2011	1:01:32 AM	Main Vac valve opened
2/4/2011	1:01:32 AM	Bypass valve opened
2/4/2011	1:01:32 AM	Helium MFC set to  0.000000
2/4/2011	1:01:32 AM	H2 MFC set to  0.000000
2/4/2011	1:01:32 AM	BCl3 MFC set to  0.000000
2/4/2011	1:01:32 AM	PHl3 MFC set to  0.000000
2/4/2011	1:01:32 AM	SiCl4 MFC set to  0.000000
2/4/2011	1:01:32 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:01:33 AM	Tube furnace set to 0
2/4/2011	1:01:33 AM	Run finished at 1:01 AM
2/4/2011	1:01:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	1:01:42 AM	Helium MFC set to  50.000000
2/4/2011	1:01:42 AM	Helium valve opened
2/4/2011	1:03:05 AM	Helium MFC set to  0.000000
2/4/2011	1:03:06 AM	Helium valve closed
2/4/2011	1:03:56 AM	Recipe started at 1:03 AM
2/4/2011	1:03:56 AM	Helium valve closed
2/4/2011	1:03:56 AM	BCl3 valve closed
2/4/2011	1:03:56 AM	PH3 valve closed
2/4/2011	1:03:56 AM	SiCl4 pre valve closed
2/4/2011	1:03:56 AM	SiCl4 post valve closed
2/4/2011	1:03:56 AM	Main Vac valve closed
2/4/2011	1:03:56 AM	Bypass valve closed
2/4/2011	1:03:56 AM	Bubbler valve closed
2/4/2011	1:03:56 AM	H2 valve opened
2/4/2011	1:03:56 AM	Helium MFC set to  0.000000
2/4/2011	1:03:56 AM	H2 MFC set to  500.000000
2/4/2011	1:03:56 AM	BCl3 MFC set to  0.000000
2/4/2011	1:03:56 AM	PHl3 MFC set to  0.000000
2/4/2011	1:03:56 AM	SiCl4 MFC set to  0.000000
2/4/2011	1:03:56 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:03:56 AM	Tube furnace set to 0
2/4/2011	1:05:14 AM	Helium valve closed
2/4/2011	1:05:14 AM	BCl3 valve closed
2/4/2011	1:05:14 AM	PH3 valve closed
2/4/2011	1:05:14 AM	SiCl4 pre valve closed
2/4/2011	1:05:14 AM	SiCl4 post valve closed
2/4/2011	1:05:14 AM	Main Vac valve closed
2/4/2011	1:05:14 AM	Bypass valve closed
2/4/2011	1:05:14 AM	H2 valve opened
2/4/2011	1:05:14 AM	Bubbler valve opened
2/4/2011	1:05:14 AM	Helium MFC set to  0.000000
2/4/2011	1:05:14 AM	H2 MFC set to  500.000000
2/4/2011	1:05:14 AM	BCl3 MFC set to  0.000000
2/4/2011	1:05:14 AM	PHl3 MFC set to  0.000000
2/4/2011	1:05:15 AM	SiCl4 MFC set to  0.000000
2/4/2011	1:05:15 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:05:15 AM	Tube furnace set to 1000
2/4/2011	1:25:15 AM	Helium valve closed
2/4/2011	1:25:15 AM	PH3 valve closed
2/4/2011	1:25:15 AM	Main Vac valve closed
2/4/2011	1:25:15 AM	Bypass valve closed
2/4/2011	1:25:15 AM	H2 valve opened
2/4/2011	1:25:15 AM	BCl3 valve opened
2/4/2011	1:25:15 AM	SiCl4 pre valve opened
2/4/2011	1:25:15 AM	SiCl4 post valve opened
2/4/2011	1:25:15 AM	Bubbler valve opened
2/4/2011	1:25:15 AM	Helium MFC set to  0.000000
2/4/2011	1:25:15 AM	H2 MFC set to  500.000000
2/4/2011	1:25:15 AM	BCl3 MFC set to  2.000000
2/4/2011	1:25:15 AM	PHl3 MFC set to  0.000000
2/4/2011	1:25:15 AM	SiCl4 MFC set to  50.000000
2/4/2011	1:25:15 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:25:15 AM	Tube furnace set to 1000
2/4/2011	1:45:15 AM	H2 valve closed
2/4/2011	1:45:15 AM	BCl3 valve closed
2/4/2011	1:45:15 AM	PH3 valve closed
2/4/2011	1:45:15 AM	SiCl4 pre valve closed
2/4/2011	1:45:15 AM	SiCl4 post valve closed
2/4/2011	1:45:15 AM	Main Vac valve closed
2/4/2011	1:45:15 AM	Bypass valve closed
2/4/2011	1:45:15 AM	Helium valve opened
2/4/2011	1:45:15 AM	Bubbler valve opened
2/4/2011	1:45:15 AM	Helium MFC set to  500.000000
2/4/2011	1:45:15 AM	H2 MFC set to  0.000000
2/4/2011	1:45:15 AM	BCl3 MFC set to  0.000000
2/4/2011	1:45:15 AM	PHl3 MFC set to  0.000000
2/4/2011	1:45:15 AM	SiCl4 MFC set to  0.000000
2/4/2011	1:45:15 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:45:15 AM	Tube furnace set to 0
2/4/2011	2:05:15 AM	Helium valve closed
2/4/2011	2:05:15 AM	H2 valve closed
2/4/2011	2:05:15 AM	BCl3 valve closed
2/4/2011	2:05:15 AM	PH3 valve closed
2/4/2011	2:05:15 AM	SiCl4 pre valve closed
2/4/2011	2:05:15 AM	SiCl4 post valve closed
2/4/2011	2:05:15 AM	Main Vac valve closed
2/4/2011	2:05:15 AM	Bypass valve closed
2/4/2011	2:05:15 AM	Bubbler valve closed
2/4/2011	2:05:15 AM	Helium MFC set to  0.000000
2/4/2011	2:05:15 AM	H2 MFC set to  0.000000
2/4/2011	2:05:15 AM	BCl3 MFC set to  0.000000
2/4/2011	2:05:15 AM	PHl3 MFC set to  0.000000
2/4/2011	2:05:15 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:05:15 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:05:15 AM	Tube furnace set to 0
2/4/2011	2:05:15 AM	Run finished at 2:05 AM
2/4/2011	2:37:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	2:38:00 AM	Recipe started at 2:37 AM
2/4/2011	2:38:00 AM	H2 valve closed
2/4/2011	2:38:00 AM	BCl3 valve closed
2/4/2011	2:38:00 AM	PH3 valve closed
2/4/2011	2:38:00 AM	SiCl4 pre valve closed
2/4/2011	2:38:00 AM	SiCl4 post valve closed
2/4/2011	2:38:00 AM	Main Vac valve closed
2/4/2011	2:38:00 AM	Bypass valve closed
2/4/2011	2:38:00 AM	Bubbler valve closed
2/4/2011	2:38:00 AM	Helium valve opened
2/4/2011	2:38:00 AM	Helium MFC set to  500.000000
2/4/2011	2:38:00 AM	H2 MFC set to  0.000000
2/4/2011	2:38:00 AM	BCl3 MFC set to  0.000000
2/4/2011	2:38:00 AM	PHl3 MFC set to  0.000000
2/4/2011	2:38:00 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:38:00 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:38:00 AM	Tube furnace set to 0
2/4/2011	2:38:07 AM	Helium valve closed
2/4/2011	2:38:07 AM	H2 valve closed
2/4/2011	2:38:07 AM	BCl3 valve closed
2/4/2011	2:38:07 AM	PH3 valve closed
2/4/2011	2:38:07 AM	SiCl4 pre valve closed
2/4/2011	2:38:07 AM	SiCl4 post valve closed
2/4/2011	2:38:07 AM	Main Vac valve closed
2/4/2011	2:38:07 AM	Bypass valve closed
2/4/2011	2:38:07 AM	Bubbler valve closed
2/4/2011	2:38:07 AM	Helium MFC set to  0.000000
2/4/2011	2:38:07 AM	H2 MFC set to  0.000000
2/4/2011	2:38:07 AM	BCl3 MFC set to  0.000000
2/4/2011	2:38:07 AM	PHl3 MFC set to  0.000000
2/4/2011	2:38:07 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:38:07 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:38:07 AM	Tube furnace set to 0
2/4/2011	2:38:07 AM	Run finished at 2:38 AM
2/4/2011	2:38:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	2:42:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	2:42:15 AM	Recipe started at 2:42 AM
2/4/2011	2:42:15 AM	Helium valve closed
2/4/2011	2:42:15 AM	H2 valve closed
2/4/2011	2:42:15 AM	BCl3 valve closed
2/4/2011	2:42:15 AM	PH3 valve closed
2/4/2011	2:42:15 AM	SiCl4 pre valve closed
2/4/2011	2:42:15 AM	SiCl4 post valve closed
2/4/2011	2:42:15 AM	Main Vac valve closed
2/4/2011	2:42:15 AM	Bubbler valve closed
2/4/2011	2:42:15 AM	Bypass valve opened
2/4/2011	2:42:15 AM	Helium MFC set to  0.000000
2/4/2011	2:42:15 AM	H2 MFC set to  0.000000
2/4/2011	2:42:15 AM	BCl3 MFC set to  0.000000
2/4/2011	2:42:15 AM	PHl3 MFC set to  0.000000
2/4/2011	2:42:15 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:42:15 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:42:15 AM	Tube furnace set to 0
2/4/2011	2:42:48 AM	Helium valve closed
2/4/2011	2:42:48 AM	H2 valve closed
2/4/2011	2:42:48 AM	BCl3 valve closed
2/4/2011	2:42:48 AM	PH3 valve closed
2/4/2011	2:42:48 AM	SiCl4 pre valve closed
2/4/2011	2:42:48 AM	SiCl4 post valve closed
2/4/2011	2:42:48 AM	Bubbler valve closed
2/4/2011	2:42:48 AM	Main Vac valve opened
2/4/2011	2:42:48 AM	Bypass valve opened
2/4/2011	2:42:48 AM	Helium MFC set to  0.000000
2/4/2011	2:42:48 AM	H2 MFC set to  0.000000
2/4/2011	2:42:48 AM	BCl3 MFC set to  0.000000
2/4/2011	2:42:48 AM	PHl3 MFC set to  0.000000
2/4/2011	2:42:48 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:42:48 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:42:49 AM	Tube furnace set to 0
2/4/2011	2:42:49 AM	Run finished at 2:42 AM
2/4/2011	2:42:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	2:45:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/4/2011	2:45:12 AM	Recipe started at 2:45 AM
2/4/2011	2:45:12 AM	Helium valve closed
2/4/2011	2:45:12 AM	H2 valve closed
2/4/2011	2:45:12 AM	BCl3 valve closed
2/4/2011	2:45:12 AM	PH3 valve closed
2/4/2011	2:45:12 AM	SiCl4 pre valve closed
2/4/2011	2:45:12 AM	SiCl4 post valve closed
2/4/2011	2:45:12 AM	Main Vac valve closed
2/4/2011	2:45:12 AM	Bubbler valve closed
2/4/2011	2:45:12 AM	Bypass valve opened
2/4/2011	2:45:12 AM	Helium MFC set to  0.000000
2/4/2011	2:45:12 AM	H2 MFC set to  0.000000
2/4/2011	2:45:12 AM	BCl3 MFC set to  0.000000
2/4/2011	2:45:12 AM	PHl3 MFC set to  0.000000
2/4/2011	2:45:12 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:45:12 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:45:12 AM	Tube furnace set to 0
2/4/2011	2:45:12 AM	Helium valve closed
2/4/2011	2:45:12 AM	H2 valve closed
2/4/2011	2:45:12 AM	BCl3 valve closed
2/4/2011	2:45:12 AM	PH3 valve closed
2/4/2011	2:45:12 AM	SiCl4 pre valve closed
2/4/2011	2:45:12 AM	SiCl4 post valve closed
2/4/2011	2:45:12 AM	Bubbler valve closed
2/4/2011	2:45:12 AM	Main Vac valve opened
2/4/2011	2:45:12 AM	Bypass valve opened
2/4/2011	2:45:12 AM	Helium MFC set to  0.000000
2/4/2011	2:45:12 AM	H2 MFC set to  0.000000
2/4/2011	2:45:12 AM	BCl3 MFC set to  0.000000
2/4/2011	2:45:12 AM	PHl3 MFC set to  0.000000
2/4/2011	2:45:12 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:45:12 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:45:13 AM	Tube furnace set to 0
2/4/2011	2:46:13 AM	H2 valve closed
2/4/2011	2:46:13 AM	BCl3 valve closed
2/4/2011	2:46:13 AM	PH3 valve closed
2/4/2011	2:46:13 AM	SiCl4 pre valve closed
2/4/2011	2:46:13 AM	SiCl4 post valve closed
2/4/2011	2:46:13 AM	Bubbler valve closed
2/4/2011	2:46:13 AM	Helium valve opened
2/4/2011	2:46:13 AM	Main Vac valve opened
2/4/2011	2:46:13 AM	Bypass valve opened
2/4/2011	2:46:13 AM	Helium MFC set to  100.000000
2/4/2011	2:46:13 AM	H2 MFC set to  0.000000
2/4/2011	2:46:13 AM	BCl3 MFC set to  0.000000
2/4/2011	2:46:13 AM	PHl3 MFC set to  0.000000
2/4/2011	2:46:13 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:46:13 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:46:13 AM	Tube furnace set to 0
2/4/2011	2:47:13 AM	Helium valve closed
2/4/2011	2:47:13 AM	H2 valve closed
2/4/2011	2:47:13 AM	BCl3 valve closed
2/4/2011	2:47:13 AM	PH3 valve closed
2/4/2011	2:47:13 AM	SiCl4 pre valve closed
2/4/2011	2:47:13 AM	SiCl4 post valve closed
2/4/2011	2:47:13 AM	Bubbler valve closed
2/4/2011	2:47:13 AM	Main Vac valve opened
2/4/2011	2:47:13 AM	Bypass valve opened
2/4/2011	2:47:13 AM	Helium MFC set to  0.000000
2/4/2011	2:47:13 AM	H2 MFC set to  0.000000
2/4/2011	2:47:13 AM	BCl3 MFC set to  0.000000
2/4/2011	2:47:13 AM	PHl3 MFC set to  0.000000
2/4/2011	2:47:13 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:47:13 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:47:13 AM	Tube furnace set to 0
2/4/2011	2:48:13 AM	H2 valve closed
2/4/2011	2:48:13 AM	BCl3 valve closed
2/4/2011	2:48:13 AM	PH3 valve closed
2/4/2011	2:48:13 AM	SiCl4 pre valve closed
2/4/2011	2:48:13 AM	SiCl4 post valve closed
2/4/2011	2:48:13 AM	Bubbler valve closed
2/4/2011	2:48:13 AM	Helium valve opened
2/4/2011	2:48:13 AM	Main Vac valve opened
2/4/2011	2:48:13 AM	Bypass valve opened
2/4/2011	2:48:13 AM	Helium MFC set to  100.000000
2/4/2011	2:48:13 AM	H2 MFC set to  0.000000
2/4/2011	2:48:13 AM	BCl3 MFC set to  0.000000
2/4/2011	2:48:13 AM	PHl3 MFC set to  0.000000
2/4/2011	2:48:13 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:48:13 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:48:13 AM	Tube furnace set to 0
2/4/2011	2:49:13 AM	Helium valve closed
2/4/2011	2:49:13 AM	H2 valve closed
2/4/2011	2:49:13 AM	BCl3 valve closed
2/4/2011	2:49:13 AM	PH3 valve closed
2/4/2011	2:49:13 AM	SiCl4 pre valve closed
2/4/2011	2:49:13 AM	SiCl4 post valve closed
2/4/2011	2:49:13 AM	Bubbler valve closed
2/4/2011	2:49:13 AM	Main Vac valve opened
2/4/2011	2:49:13 AM	Bypass valve opened
2/4/2011	2:49:13 AM	Helium MFC set to  0.000000
2/4/2011	2:49:13 AM	H2 MFC set to  0.000000
2/4/2011	2:49:13 AM	BCl3 MFC set to  0.000000
2/4/2011	2:49:13 AM	PHl3 MFC set to  0.000000
2/4/2011	2:49:13 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:49:13 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:49:13 AM	Tube furnace set to 0
2/4/2011	2:50:13 AM	H2 valve closed
2/4/2011	2:50:13 AM	BCl3 valve closed
2/4/2011	2:50:13 AM	PH3 valve closed
2/4/2011	2:50:13 AM	SiCl4 pre valve closed
2/4/2011	2:50:13 AM	SiCl4 post valve closed
2/4/2011	2:50:13 AM	Bubbler valve closed
2/4/2011	2:50:13 AM	Helium valve opened
2/4/2011	2:50:13 AM	Main Vac valve opened
2/4/2011	2:50:13 AM	Bypass valve opened
2/4/2011	2:50:14 AM	Helium MFC set to  100.000000
2/4/2011	2:50:14 AM	H2 MFC set to  0.000000
2/4/2011	2:50:14 AM	BCl3 MFC set to  0.000000
2/4/2011	2:50:14 AM	PHl3 MFC set to  0.000000
2/4/2011	2:50:14 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:50:14 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:50:14 AM	Tube furnace set to 0
2/4/2011	2:51:14 AM	Helium valve closed
2/4/2011	2:51:14 AM	H2 valve closed
2/4/2011	2:51:14 AM	BCl3 valve closed
2/4/2011	2:51:14 AM	PH3 valve closed
2/4/2011	2:51:14 AM	SiCl4 pre valve closed
2/4/2011	2:51:14 AM	SiCl4 post valve closed
2/4/2011	2:51:14 AM	Bubbler valve closed
2/4/2011	2:51:14 AM	Main Vac valve opened
2/4/2011	2:51:14 AM	Bypass valve opened
2/4/2011	2:51:14 AM	Helium MFC set to  0.000000
2/4/2011	2:51:14 AM	H2 MFC set to  0.000000
2/4/2011	2:51:14 AM	BCl3 MFC set to  0.000000
2/4/2011	2:51:14 AM	PHl3 MFC set to  0.000000
2/4/2011	2:51:14 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:51:14 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:51:14 AM	Tube furnace set to 0
2/4/2011	2:52:14 AM	H2 valve closed
2/4/2011	2:52:14 AM	BCl3 valve closed
2/4/2011	2:52:14 AM	PH3 valve closed
2/4/2011	2:52:14 AM	SiCl4 pre valve closed
2/4/2011	2:52:14 AM	SiCl4 post valve closed
2/4/2011	2:52:14 AM	Bubbler valve closed
2/4/2011	2:52:14 AM	Helium valve opened
2/4/2011	2:52:14 AM	Main Vac valve opened
2/4/2011	2:52:14 AM	Bypass valve opened
2/4/2011	2:52:14 AM	Helium MFC set to  100.000000
2/4/2011	2:52:14 AM	H2 MFC set to  0.000000
2/4/2011	2:52:14 AM	BCl3 MFC set to  0.000000
2/4/2011	2:52:14 AM	PHl3 MFC set to  0.000000
2/4/2011	2:52:14 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:52:14 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:52:14 AM	Tube furnace set to 0
2/4/2011	2:53:14 AM	Helium valve closed
2/4/2011	2:53:14 AM	H2 valve closed
2/4/2011	2:53:14 AM	BCl3 valve closed
2/4/2011	2:53:14 AM	PH3 valve closed
2/4/2011	2:53:14 AM	SiCl4 pre valve closed
2/4/2011	2:53:14 AM	SiCl4 post valve closed
2/4/2011	2:53:14 AM	Bubbler valve closed
2/4/2011	2:53:14 AM	Main Vac valve opened
2/4/2011	2:53:14 AM	Bypass valve opened
2/4/2011	2:53:14 AM	Helium MFC set to  0.000000
2/4/2011	2:53:14 AM	H2 MFC set to  0.000000
2/4/2011	2:53:14 AM	BCl3 MFC set to  0.000000
2/4/2011	2:53:14 AM	PHl3 MFC set to  0.000000
2/4/2011	2:53:14 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:53:14 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:53:15 AM	Tube furnace set to 0
2/4/2011	2:54:15 AM	H2 valve closed
2/4/2011	2:54:15 AM	BCl3 valve closed
2/4/2011	2:54:15 AM	PH3 valve closed
2/4/2011	2:54:15 AM	SiCl4 pre valve closed
2/4/2011	2:54:15 AM	SiCl4 post valve closed
2/4/2011	2:54:15 AM	Bubbler valve closed
2/4/2011	2:54:15 AM	Helium valve opened
2/4/2011	2:54:15 AM	Main Vac valve opened
2/4/2011	2:54:15 AM	Bypass valve opened
2/4/2011	2:54:15 AM	Helium MFC set to  100.000000
2/4/2011	2:54:15 AM	H2 MFC set to  0.000000
2/4/2011	2:54:15 AM	BCl3 MFC set to  0.000000
2/4/2011	2:54:15 AM	PHl3 MFC set to  0.000000
2/4/2011	2:54:15 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:54:15 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:54:15 AM	Tube furnace set to 0
2/4/2011	2:55:15 AM	Helium valve closed
2/4/2011	2:55:15 AM	H2 valve closed
2/4/2011	2:55:15 AM	BCl3 valve closed
2/4/2011	2:55:15 AM	PH3 valve closed
2/4/2011	2:55:15 AM	SiCl4 pre valve closed
2/4/2011	2:55:15 AM	SiCl4 post valve closed
2/4/2011	2:55:15 AM	Bubbler valve closed
2/4/2011	2:55:15 AM	Main Vac valve opened
2/4/2011	2:55:15 AM	Bypass valve opened
2/4/2011	2:55:15 AM	Helium MFC set to  0.000000
2/4/2011	2:55:15 AM	H2 MFC set to  0.000000
2/4/2011	2:55:15 AM	BCl3 MFC set to  0.000000
2/4/2011	2:55:15 AM	PHl3 MFC set to  0.000000
2/4/2011	2:55:15 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:55:15 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:55:15 AM	Tube furnace set to 0
2/4/2011	2:56:15 AM	H2 valve closed
2/4/2011	2:56:15 AM	BCl3 valve closed
2/4/2011	2:56:15 AM	PH3 valve closed
2/4/2011	2:56:15 AM	SiCl4 pre valve closed
2/4/2011	2:56:15 AM	SiCl4 post valve closed
2/4/2011	2:56:15 AM	Bubbler valve closed
2/4/2011	2:56:15 AM	Helium valve opened
2/4/2011	2:56:15 AM	Main Vac valve opened
2/4/2011	2:56:15 AM	Bypass valve opened
2/4/2011	2:56:15 AM	Helium MFC set to  100.000000
2/4/2011	2:56:15 AM	H2 MFC set to  0.000000
2/4/2011	2:56:15 AM	BCl3 MFC set to  0.000000
2/4/2011	2:56:15 AM	PHl3 MFC set to  0.000000
2/4/2011	2:56:15 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:56:15 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:56:15 AM	Tube furnace set to 0
2/4/2011	2:57:15 AM	Helium valve closed
2/4/2011	2:57:15 AM	H2 valve closed
2/4/2011	2:57:15 AM	BCl3 valve closed
2/4/2011	2:57:15 AM	PH3 valve closed
2/4/2011	2:57:15 AM	SiCl4 pre valve closed
2/4/2011	2:57:15 AM	SiCl4 post valve closed
2/4/2011	2:57:15 AM	Bubbler valve closed
2/4/2011	2:57:15 AM	Main Vac valve opened
2/4/2011	2:57:15 AM	Bypass valve opened
2/4/2011	2:57:15 AM	Helium MFC set to  0.000000
2/4/2011	2:57:15 AM	H2 MFC set to  0.000000
2/4/2011	2:57:15 AM	BCl3 MFC set to  0.000000
2/4/2011	2:57:15 AM	PHl3 MFC set to  0.000000
2/4/2011	2:57:15 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:57:15 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:57:15 AM	Tube furnace set to 0
2/4/2011	2:58:15 AM	H2 valve closed
2/4/2011	2:58:15 AM	BCl3 valve closed
2/4/2011	2:58:15 AM	PH3 valve closed
2/4/2011	2:58:15 AM	SiCl4 pre valve closed
2/4/2011	2:58:15 AM	SiCl4 post valve closed
2/4/2011	2:58:15 AM	Bubbler valve closed
2/4/2011	2:58:15 AM	Helium valve opened
2/4/2011	2:58:15 AM	Main Vac valve opened
2/4/2011	2:58:15 AM	Bypass valve opened
2/4/2011	2:58:15 AM	Helium MFC set to  100.000000
2/4/2011	2:58:15 AM	H2 MFC set to  0.000000
2/4/2011	2:58:15 AM	BCl3 MFC set to  0.000000
2/4/2011	2:58:15 AM	PHl3 MFC set to  0.000000
2/4/2011	2:58:15 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:58:15 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:58:16 AM	Tube furnace set to 0
2/4/2011	2:59:16 AM	Helium valve closed
2/4/2011	2:59:16 AM	H2 valve closed
2/4/2011	2:59:16 AM	BCl3 valve closed
2/4/2011	2:59:16 AM	PH3 valve closed
2/4/2011	2:59:16 AM	SiCl4 pre valve closed
2/4/2011	2:59:16 AM	SiCl4 post valve closed
2/4/2011	2:59:16 AM	Bubbler valve closed
2/4/2011	2:59:16 AM	Main Vac valve opened
2/4/2011	2:59:16 AM	Bypass valve opened
2/4/2011	2:59:16 AM	Helium MFC set to  0.000000
2/4/2011	2:59:16 AM	H2 MFC set to  0.000000
2/4/2011	2:59:16 AM	BCl3 MFC set to  0.000000
2/4/2011	2:59:16 AM	PHl3 MFC set to  0.000000
2/4/2011	2:59:16 AM	SiCl4 MFC set to  0.000000
2/4/2011	2:59:16 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:59:16 AM	Tube furnace set to 0
2/4/2011	3:00:16 AM	H2 valve closed
2/4/2011	3:00:16 AM	BCl3 valve closed
2/4/2011	3:00:16 AM	PH3 valve closed
2/4/2011	3:00:16 AM	SiCl4 pre valve closed
2/4/2011	3:00:16 AM	SiCl4 post valve closed
2/4/2011	3:00:16 AM	Bubbler valve closed
2/4/2011	3:00:16 AM	Helium valve opened
2/4/2011	3:00:16 AM	Main Vac valve opened
2/4/2011	3:00:16 AM	Bypass valve opened
2/4/2011	3:00:16 AM	Helium MFC set to  100.000000
2/4/2011	3:00:16 AM	H2 MFC set to  0.000000
2/4/2011	3:00:16 AM	BCl3 MFC set to  0.000000
2/4/2011	3:00:16 AM	PHl3 MFC set to  0.000000
2/4/2011	3:00:16 AM	SiCl4 MFC set to  0.000000
2/4/2011	3:00:16 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:00:16 AM	Tube furnace set to 0
2/4/2011	3:01:16 AM	Helium valve closed
2/4/2011	3:01:16 AM	H2 valve closed
2/4/2011	3:01:16 AM	BCl3 valve closed
2/4/2011	3:01:16 AM	PH3 valve closed
2/4/2011	3:01:16 AM	SiCl4 pre valve closed
2/4/2011	3:01:16 AM	SiCl4 post valve closed
2/4/2011	3:01:16 AM	Bubbler valve closed
2/4/2011	3:01:16 AM	Main Vac valve opened
2/4/2011	3:01:16 AM	Bypass valve opened
2/4/2011	3:01:16 AM	Helium MFC set to  0.000000
2/4/2011	3:01:16 AM	H2 MFC set to  0.000000
2/4/2011	3:01:16 AM	BCl3 MFC set to  0.000000
2/4/2011	3:01:16 AM	PHl3 MFC set to  0.000000
2/4/2011	3:01:16 AM	SiCl4 MFC set to  0.000000
2/4/2011	3:01:16 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:01:16 AM	Tube furnace set to 0
2/4/2011	3:02:16 AM	H2 valve closed
2/4/2011	3:02:16 AM	BCl3 valve closed
2/4/2011	3:02:16 AM	PH3 valve closed
2/4/2011	3:02:16 AM	SiCl4 pre valve closed
2/4/2011	3:02:16 AM	SiCl4 post valve closed
2/4/2011	3:02:16 AM	Bubbler valve closed
2/4/2011	3:02:16 AM	Helium valve opened
2/4/2011	3:02:16 AM	Main Vac valve opened
2/4/2011	3:02:16 AM	Bypass valve opened
2/4/2011	3:02:16 AM	Helium MFC set to  100.000000
2/4/2011	3:02:16 AM	H2 MFC set to  0.000000
2/4/2011	3:02:16 AM	BCl3 MFC set to  0.000000
2/4/2011	3:02:16 AM	PHl3 MFC set to  0.000000
2/4/2011	3:02:16 AM	SiCl4 MFC set to  0.000000
2/4/2011	3:02:16 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:02:16 AM	Tube furnace set to 0
2/4/2011	3:03:17 AM	Helium valve closed
2/4/2011	3:03:17 AM	H2 valve closed
2/4/2011	3:03:17 AM	BCl3 valve closed
2/4/2011	3:03:17 AM	PH3 valve closed
2/4/2011	3:03:17 AM	SiCl4 pre valve closed
2/4/2011	3:03:17 AM	SiCl4 post valve closed
2/4/2011	3:03:17 AM	Bubbler valve closed
2/4/2011	3:03:17 AM	Main Vac valve opened
2/4/2011	3:03:17 AM	Bypass valve opened
2/4/2011	3:03:17 AM	Helium MFC set to  0.000000
2/4/2011	3:03:17 AM	H2 MFC set to  0.000000
2/4/2011	3:03:17 AM	BCl3 MFC set to  0.000000
2/4/2011	3:03:17 AM	PHl3 MFC set to  0.000000
2/4/2011	3:03:17 AM	SiCl4 MFC set to  0.000000
2/4/2011	3:03:17 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:03:17 AM	Tube furnace set to 0
2/4/2011	3:04:17 AM	H2 valve closed
2/4/2011	3:04:17 AM	BCl3 valve closed
2/4/2011	3:04:17 AM	PH3 valve closed
2/4/2011	3:04:17 AM	SiCl4 pre valve closed
2/4/2011	3:04:17 AM	SiCl4 post valve closed
2/4/2011	3:04:17 AM	Bubbler valve closed
2/4/2011	3:04:17 AM	Helium valve opened
2/4/2011	3:04:17 AM	Main Vac valve opened
2/4/2011	3:04:17 AM	Bypass valve opened
2/4/2011	3:04:17 AM	Helium MFC set to  100.000000
2/4/2011	3:04:17 AM	H2 MFC set to  0.000000
2/4/2011	3:04:17 AM	BCl3 MFC set to  0.000000
2/4/2011	3:04:17 AM	PHl3 MFC set to  0.000000
2/4/2011	3:04:17 AM	SiCl4 MFC set to  0.000000
2/4/2011	3:04:17 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:04:17 AM	Tube furnace set to 0
2/4/2011	3:05:17 AM	Helium valve closed
2/4/2011	3:05:17 AM	H2 valve closed
2/4/2011	3:05:17 AM	BCl3 valve closed
2/4/2011	3:05:17 AM	PH3 valve closed
2/4/2011	3:05:17 AM	SiCl4 pre valve closed
2/4/2011	3:05:17 AM	SiCl4 post valve closed
2/4/2011	3:05:17 AM	Bubbler valve closed
2/4/2011	3:05:17 AM	Main Vac valve opened
2/4/2011	3:05:17 AM	Bypass valve opened
2/4/2011	3:05:17 AM	Helium MFC set to  0.000000
2/4/2011	3:05:17 AM	H2 MFC set to  0.000000
2/4/2011	3:05:17 AM	BCl3 MFC set to  0.000000
2/4/2011	3:05:17 AM	PHl3 MFC set to  0.000000
2/4/2011	3:05:17 AM	SiCl4 MFC set to  0.000000
2/4/2011	3:05:17 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:05:17 AM	Tube furnace set to 0
2/4/2011	3:05:18 AM	Run finished at 3:05 AM
2/4/2011	3:05:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/4/2011	3:11:14 AM	Helium MFC set to  50.000000
2/4/2011	3:11:16 AM	Helium valve opened
2/4/2011	3:16:02 AM	Helium MFC set to  0.000000
2/4/2011	3:16:03 AM	Helium valve closed
2/4/2011	3:16:53 AM	Recipe started at 3:16 AM
2/4/2011	3:16:53 AM	Helium valve closed
2/4/2011	3:16:53 AM	BCl3 valve closed
2/4/2011	3:16:53 AM	PH3 valve closed
2/4/2011	3:16:53 AM	SiCl4 pre valve closed
2/4/2011	3:16:53 AM	SiCl4 post valve closed
2/4/2011	3:16:53 AM	Main Vac valve closed
2/4/2011	3:16:53 AM	Bypass valve closed
2/4/2011	3:16:53 AM	Bubbler valve closed
2/4/2011	3:16:53 AM	H2 valve opened
2/4/2011	3:16:53 AM	Helium MFC set to  0.000000
2/4/2011	3:16:53 AM	H2 MFC set to  500.000000
2/4/2011	3:16:53 AM	BCl3 MFC set to  0.000000
2/4/2011	3:16:53 AM	PHl3 MFC set to  0.000000
2/4/2011	3:16:53 AM	SiCl4 MFC set to  0.000000
2/4/2011	3:16:53 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:16:54 AM	Tube furnace set to 0
2/4/2011	3:18:13 AM	Helium valve closed
2/4/2011	3:18:13 AM	BCl3 valve closed
2/4/2011	3:18:13 AM	PH3 valve closed
2/4/2011	3:18:13 AM	SiCl4 pre valve closed
2/4/2011	3:18:13 AM	SiCl4 post valve closed
2/4/2011	3:18:13 AM	Main Vac valve closed
2/4/2011	3:18:13 AM	Bypass valve closed
2/4/2011	3:18:13 AM	H2 valve opened
2/4/2011	3:18:13 AM	Bubbler valve opened
2/4/2011	3:18:13 AM	Helium MFC set to  0.000000
2/4/2011	3:18:13 AM	H2 MFC set to  500.000000
2/4/2011	3:18:13 AM	BCl3 MFC set to  0.000000
2/4/2011	3:18:13 AM	PHl3 MFC set to  0.000000
2/4/2011	3:18:13 AM	SiCl4 MFC set to  0.000000
2/4/2011	3:18:13 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:18:13 AM	Tube furnace set to 1000
2/4/2011	3:38:13 AM	Helium valve closed
2/4/2011	3:38:13 AM	PH3 valve closed
2/4/2011	3:38:13 AM	Main Vac valve closed
2/4/2011	3:38:13 AM	Bypass valve closed
2/4/2011	3:38:13 AM	H2 valve opened
2/4/2011	3:38:13 AM	BCl3 valve opened
2/4/2011	3:38:13 AM	SiCl4 pre valve opened
2/4/2011	3:38:13 AM	SiCl4 post valve opened
2/4/2011	3:38:13 AM	Bubbler valve opened
2/4/2011	3:38:13 AM	Helium MFC set to  0.000000
2/4/2011	3:38:13 AM	H2 MFC set to  500.000000
2/4/2011	3:38:13 AM	BCl3 MFC set to  5.000000
2/4/2011	3:38:13 AM	PHl3 MFC set to  0.000000
2/4/2011	3:38:13 AM	SiCl4 MFC set to  50.000000
2/4/2011	3:38:13 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:38:13 AM	Tube furnace set to 1000
2/4/2011	3:58:13 AM	H2 valve closed
2/4/2011	3:58:13 AM	BCl3 valve closed
2/4/2011	3:58:13 AM	PH3 valve closed
2/4/2011	3:58:13 AM	SiCl4 pre valve closed
2/4/2011	3:58:13 AM	SiCl4 post valve closed
2/4/2011	3:58:13 AM	Main Vac valve closed
2/4/2011	3:58:13 AM	Bypass valve closed
2/4/2011	3:58:13 AM	Helium valve opened
2/4/2011	3:58:13 AM	Bubbler valve opened
2/4/2011	3:58:13 AM	Helium MFC set to  500.000000
2/4/2011	3:58:13 AM	H2 MFC set to  0.000000
2/4/2011	3:58:13 AM	BCl3 MFC set to  0.000000
2/4/2011	3:58:13 AM	PHl3 MFC set to  0.000000
2/4/2011	3:58:13 AM	SiCl4 MFC set to  0.000000
2/4/2011	3:58:13 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:58:13 AM	Tube furnace set to 0
2/4/2011	4:18:13 AM	Helium valve closed
2/4/2011	4:18:13 AM	H2 valve closed
2/4/2011	4:18:13 AM	BCl3 valve closed
2/4/2011	4:18:13 AM	PH3 valve closed
2/4/2011	4:18:13 AM	SiCl4 pre valve closed
2/4/2011	4:18:13 AM	SiCl4 post valve closed
2/4/2011	4:18:13 AM	Main Vac valve closed
2/4/2011	4:18:13 AM	Bypass valve closed
2/4/2011	4:18:13 AM	Bubbler valve closed
2/4/2011	4:18:13 AM	Helium MFC set to  0.000000
2/4/2011	4:18:13 AM	H2 MFC set to  0.000000
2/4/2011	4:18:13 AM	BCl3 MFC set to  0.000000
2/4/2011	4:18:13 AM	PHl3 MFC set to  0.000000
2/4/2011	4:18:13 AM	SiCl4 MFC set to  0.000000
2/4/2011	4:18:13 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	4:18:14 AM	Tube furnace set to 0
2/4/2011	4:18:14 AM	Run finished at 4:18 AM
2/4/2011	4:48:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	4:48:46 AM	Recipe started at 4:48 AM
2/4/2011	4:48:46 AM	H2 valve closed
2/4/2011	4:48:46 AM	BCl3 valve closed
2/4/2011	4:48:46 AM	PH3 valve closed
2/4/2011	4:48:46 AM	SiCl4 pre valve closed
2/4/2011	4:48:46 AM	SiCl4 post valve closed
2/4/2011	4:48:46 AM	Main Vac valve closed
2/4/2011	4:48:46 AM	Bypass valve closed
2/4/2011	4:48:46 AM	Bubbler valve closed
2/4/2011	4:48:46 AM	Helium valve opened
2/4/2011	4:48:46 AM	Helium MFC set to  500.000000
2/4/2011	4:48:46 AM	H2 MFC set to  0.000000
2/4/2011	4:48:46 AM	BCl3 MFC set to  0.000000
2/4/2011	4:48:46 AM	PHl3 MFC set to  0.000000
2/4/2011	4:48:46 AM	SiCl4 MFC set to  0.000000
2/4/2011	4:48:46 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	4:48:46 AM	Tube furnace set to 0
2/4/2011	4:48:54 AM	Helium valve closed
2/4/2011	4:48:54 AM	H2 valve closed
2/4/2011	4:48:54 AM	BCl3 valve closed
2/4/2011	4:48:54 AM	PH3 valve closed
2/4/2011	4:48:54 AM	SiCl4 pre valve closed
2/4/2011	4:48:54 AM	SiCl4 post valve closed
2/4/2011	4:48:54 AM	Main Vac valve closed
2/4/2011	4:48:54 AM	Bypass valve closed
2/4/2011	4:48:54 AM	Bubbler valve closed
2/4/2011	4:48:54 AM	Helium MFC set to  0.000000
2/4/2011	4:48:54 AM	H2 MFC set to  0.000000
2/4/2011	4:48:54 AM	BCl3 MFC set to  0.000000
2/4/2011	4:48:54 AM	PHl3 MFC set to  0.000000
2/4/2011	4:48:54 AM	SiCl4 MFC set to  0.000000
2/4/2011	4:48:54 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	4:48:54 AM	Tube furnace set to 0
2/4/2011	4:48:55 AM	Run finished at 4:48 AM
2/4/2011	4:48:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	4:50:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	4:50:33 AM	Recipe started at 4:50 AM
2/4/2011	4:50:33 AM	Helium valve closed
2/4/2011	4:50:33 AM	H2 valve closed
2/4/2011	4:50:33 AM	BCl3 valve closed
2/4/2011	4:50:33 AM	PH3 valve closed
2/4/2011	4:50:33 AM	SiCl4 pre valve closed
2/4/2011	4:50:33 AM	SiCl4 post valve closed
2/4/2011	4:50:33 AM	Main Vac valve closed
2/4/2011	4:50:33 AM	Bubbler valve closed
2/4/2011	4:50:33 AM	Bypass valve opened
2/4/2011	4:50:33 AM	Helium MFC set to  0.000000
2/4/2011	4:50:33 AM	H2 MFC set to  0.000000
2/4/2011	4:50:33 AM	BCl3 MFC set to  0.000000
2/4/2011	4:50:33 AM	PHl3 MFC set to  0.000000
2/4/2011	4:50:33 AM	SiCl4 MFC set to  0.000000
2/4/2011	4:50:33 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	4:50:33 AM	Tube furnace set to 0
2/4/2011	4:51:05 AM	Helium valve closed
2/4/2011	4:51:05 AM	H2 valve closed
2/4/2011	4:51:05 AM	BCl3 valve closed
2/4/2011	4:51:05 AM	PH3 valve closed
2/4/2011	4:51:05 AM	SiCl4 pre valve closed
2/4/2011	4:51:05 AM	SiCl4 post valve closed
2/4/2011	4:51:05 AM	Bubbler valve closed
2/4/2011	4:51:05 AM	Main Vac valve opened
2/4/2011	4:51:05 AM	Bypass valve opened
2/4/2011	4:51:05 AM	Helium MFC set to  0.000000
2/4/2011	4:51:05 AM	H2 MFC set to  0.000000
2/4/2011	4:51:05 AM	BCl3 MFC set to  0.000000
2/4/2011	4:51:05 AM	PHl3 MFC set to  0.000000
2/4/2011	4:51:05 AM	SiCl4 MFC set to  0.000000
2/4/2011	4:51:05 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	4:51:05 AM	Tube furnace set to 0
2/4/2011	4:51:05 AM	Run finished at 4:51 AM
2/4/2011	4:51:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	8:00:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	8:00:09 AM	Recipe started at 8:00 AM
2/4/2011	8:00:09 AM	H2 valve closed
2/4/2011	8:00:09 AM	BCl3 valve closed
2/4/2011	8:00:09 AM	PH3 valve closed
2/4/2011	8:00:09 AM	SiCl4 pre valve closed
2/4/2011	8:00:09 AM	SiCl4 post valve closed
2/4/2011	8:00:09 AM	Main Vac valve closed
2/4/2011	8:00:09 AM	Bypass valve closed
2/4/2011	8:00:09 AM	Bubbler valve closed
2/4/2011	8:00:09 AM	Helium valve opened
2/4/2011	8:00:09 AM	Helium MFC set to  500.000000
2/4/2011	8:00:09 AM	H2 MFC set to  0.000000
2/4/2011	8:00:09 AM	BCl3 MFC set to  0.000000
2/4/2011	8:00:09 AM	PHl3 MFC set to  0.000000
2/4/2011	8:00:09 AM	SiCl4 MFC set to  0.000000
2/4/2011	8:00:09 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	8:00:09 AM	Tube furnace set to 0
2/4/2011	8:01:29 AM	Helium valve closed
2/4/2011	8:01:29 AM	H2 valve closed
2/4/2011	8:01:29 AM	BCl3 valve closed
2/4/2011	8:01:29 AM	PH3 valve closed
2/4/2011	8:01:29 AM	SiCl4 pre valve closed
2/4/2011	8:01:29 AM	SiCl4 post valve closed
2/4/2011	8:01:29 AM	Main Vac valve closed
2/4/2011	8:01:29 AM	Bypass valve closed
2/4/2011	8:01:29 AM	Bubbler valve closed
2/4/2011	8:01:29 AM	Helium MFC set to  0.000000
2/4/2011	8:01:29 AM	H2 MFC set to  0.000000
2/4/2011	8:01:29 AM	BCl3 MFC set to  0.000000
2/4/2011	8:01:29 AM	PHl3 MFC set to  0.000000
2/4/2011	8:01:29 AM	SiCl4 MFC set to  0.000000
2/4/2011	8:01:29 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	8:01:29 AM	Tube furnace set to 0
2/4/2011	8:01:29 AM	Run finished at 8:01 AM
2/4/2011	8:01:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	8:04:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	8:04:44 AM	Recipe started at 8:04 AM
2/4/2011	8:04:44 AM	Helium valve closed
2/4/2011	8:04:44 AM	H2 valve closed
2/4/2011	8:04:44 AM	BCl3 valve closed
2/4/2011	8:04:44 AM	PH3 valve closed
2/4/2011	8:04:44 AM	SiCl4 pre valve closed
2/4/2011	8:04:44 AM	SiCl4 post valve closed
2/4/2011	8:04:44 AM	Main Vac valve closed
2/4/2011	8:04:44 AM	Bubbler valve closed
2/4/2011	8:04:44 AM	Bypass valve opened
2/4/2011	8:04:44 AM	Helium MFC set to  0.000000
2/4/2011	8:04:44 AM	H2 MFC set to  0.000000
2/4/2011	8:04:44 AM	BCl3 MFC set to  0.000000
2/4/2011	8:04:44 AM	PHl3 MFC set to  0.000000
2/4/2011	8:04:44 AM	SiCl4 MFC set to  0.000000
2/4/2011	8:04:44 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	8:04:44 AM	Tube furnace set to 0
2/4/2011	8:05:16 AM	Helium valve closed
2/4/2011	8:05:16 AM	H2 valve closed
2/4/2011	8:05:16 AM	BCl3 valve closed
2/4/2011	8:05:16 AM	PH3 valve closed
2/4/2011	8:05:16 AM	SiCl4 pre valve closed
2/4/2011	8:05:16 AM	SiCl4 post valve closed
2/4/2011	8:05:16 AM	Bubbler valve closed
2/4/2011	8:05:16 AM	Main Vac valve opened
2/4/2011	8:05:16 AM	Bypass valve opened
2/4/2011	8:05:16 AM	Helium MFC set to  0.000000
2/4/2011	8:05:16 AM	H2 MFC set to  0.000000
2/4/2011	8:05:16 AM	BCl3 MFC set to  0.000000
2/4/2011	8:05:16 AM	PHl3 MFC set to  0.000000
2/4/2011	8:05:16 AM	SiCl4 MFC set to  0.000000
2/4/2011	8:05:16 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	8:05:16 AM	Tube furnace set to 0
2/4/2011	8:05:16 AM	Run finished at 8:05 AM
2/4/2011	8:05:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	8:05:41 AM	Helium MFC set to  100.000000
2/4/2011	8:05:42 AM	Helium valve opened
2/4/2011	8:06:29 AM	Helium valve closed
2/4/2011	8:06:33 AM	Helium MFC set to  0.000000
2/4/2011	8:07:34 AM	Helium MFC set to  100.000000
2/4/2011	8:07:35 AM	Helium valve opened
2/4/2011	8:07:49 AM	Helium MFC set to  0.000000
2/4/2011	8:07:50 AM	Helium valve closed
2/4/2011	9:31:31 AM	Helium MFC set to  100.000000
2/4/2011	9:31:32 AM	Helium valve opened
2/4/2011	9:33:32 AM	Helium valve closed
2/4/2011	9:35:52 AM	Main Vac valve closed
2/4/2011	9:35:54 AM	Bypass valve closed
2/4/2011	9:35:58 AM	Bypass valve opened
2/4/2011	9:35:59 AM	Main Vac valve opened
2/4/2011	9:36:48 AM	Recipe started at 9:36 AM
2/4/2011	9:36:48 AM	Helium valve closed
2/4/2011	9:36:48 AM	BCl3 valve closed
2/4/2011	9:36:48 AM	PH3 valve closed
2/4/2011	9:36:48 AM	SiCl4 pre valve closed
2/4/2011	9:36:48 AM	SiCl4 post valve closed
2/4/2011	9:36:48 AM	Main Vac valve closed
2/4/2011	9:36:48 AM	Bypass valve closed
2/4/2011	9:36:48 AM	Bubbler valve closed
2/4/2011	9:36:48 AM	H2 valve opened
2/4/2011	9:36:48 AM	Helium MFC set to  0.000000
2/4/2011	9:36:48 AM	H2 MFC set to  500.000000
2/4/2011	9:36:48 AM	BCl3 MFC set to  0.000000
2/4/2011	9:36:48 AM	PHl3 MFC set to  0.000000
2/4/2011	9:36:48 AM	SiCl4 MFC set to  0.000000
2/4/2011	9:36:48 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	9:36:48 AM	Tube furnace set to 200
2/4/2011	9:38:08 AM	Helium valve closed
2/4/2011	9:38:08 AM	BCl3 valve closed
2/4/2011	9:38:08 AM	PH3 valve closed
2/4/2011	9:38:08 AM	SiCl4 pre valve closed
2/4/2011	9:38:08 AM	SiCl4 post valve closed
2/4/2011	9:38:08 AM	Main Vac valve closed
2/4/2011	9:38:08 AM	Bypass valve closed
2/4/2011	9:38:08 AM	H2 valve opened
2/4/2011	9:38:08 AM	Bubbler valve opened
2/4/2011	9:38:08 AM	Helium MFC set to  0.000000
2/4/2011	9:38:08 AM	H2 MFC set to  400.000000
2/4/2011	9:38:08 AM	BCl3 MFC set to  0.000000
2/4/2011	9:38:08 AM	PHl3 MFC set to  0.000000
2/4/2011	9:38:08 AM	SiCl4 MFC set to  0.000000
2/4/2011	9:38:08 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	9:38:09 AM	Tube furnace set to 1001
2/4/2011	9:38:38 AM	Run aborted at 9:38 AM
2/4/2011	9:38:38 AM	Helium valve closed
2/4/2011	9:38:38 AM	H2 valve closed
2/4/2011	9:38:38 AM	BCl3 valve closed
2/4/2011	9:38:38 AM	PH3 valve closed
2/4/2011	9:38:38 AM	SiCl4 pre valve closed
2/4/2011	9:38:38 AM	SiCl4 post valve closed
2/4/2011	9:38:38 AM	Bypass valve closed
2/4/2011	9:38:38 AM	Main Vac valve closed
2/4/2011	9:38:38 AM	Bubbler valve closed
2/4/2011	9:38:38 AM	Helium MFC set to  0.000000
2/4/2011	9:38:38 AM	H2 MFC set to  0.000000
2/4/2011	9:38:38 AM	BCl3 MFC set to  0.000000
2/4/2011	9:38:38 AM	PHl3 MFC set to  0.000000
2/4/2011	9:38:38 AM	SiCl4 MFC set to  0.000000
2/4/2011	9:38:38 AM	Tube furnace set to 0
2/4/2011	9:47:49 AM	Recipe started at 9:47 AM
2/4/2011	9:47:49 AM	Helium valve closed
2/4/2011	9:47:49 AM	BCl3 valve closed
2/4/2011	9:47:49 AM	PH3 valve closed
2/4/2011	9:47:49 AM	SiCl4 pre valve closed
2/4/2011	9:47:49 AM	SiCl4 post valve closed
2/4/2011	9:47:49 AM	Main Vac valve closed
2/4/2011	9:47:49 AM	Bypass valve closed
2/4/2011	9:47:49 AM	Bubbler valve closed
2/4/2011	9:47:49 AM	H2 valve opened
2/4/2011	9:47:49 AM	Helium MFC set to  0.000000
2/4/2011	9:47:49 AM	H2 MFC set to  500.000000
2/4/2011	9:47:49 AM	BCl3 MFC set to  0.000000
2/4/2011	9:47:49 AM	PHl3 MFC set to  0.000000
2/4/2011	9:47:49 AM	SiCl4 MFC set to  0.000000
2/4/2011	9:47:49 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	9:47:50 AM	Tube furnace set to 200
2/4/2011	9:47:51 AM	Helium valve closed
2/4/2011	9:47:51 AM	BCl3 valve closed
2/4/2011	9:47:51 AM	PH3 valve closed
2/4/2011	9:47:51 AM	SiCl4 pre valve closed
2/4/2011	9:47:51 AM	SiCl4 post valve closed
2/4/2011	9:47:51 AM	Main Vac valve closed
2/4/2011	9:47:51 AM	Bypass valve closed
2/4/2011	9:47:51 AM	H2 valve opened
2/4/2011	9:47:51 AM	Bubbler valve opened
2/4/2011	9:47:51 AM	Helium MFC set to  0.000000
2/4/2011	9:47:51 AM	H2 MFC set to  400.000000
2/4/2011	9:47:51 AM	BCl3 MFC set to  0.000000
2/4/2011	9:47:51 AM	PHl3 MFC set to  0.000000
2/4/2011	9:47:51 AM	SiCl4 MFC set to  0.000000
2/4/2011	9:47:51 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	9:47:51 AM	Tube furnace set to 1001
2/4/2011	10:08:51 AM	Helium valve closed
2/4/2011	10:08:51 AM	BCl3 valve closed
2/4/2011	10:08:51 AM	PH3 valve closed
2/4/2011	10:08:51 AM	Main Vac valve closed
2/4/2011	10:08:51 AM	Bypass valve closed
2/4/2011	10:08:51 AM	H2 valve opened
2/4/2011	10:08:51 AM	SiCl4 pre valve opened
2/4/2011	10:08:51 AM	SiCl4 post valve opened
2/4/2011	10:08:51 AM	Bubbler valve opened
2/4/2011	10:08:51 AM	Helium MFC set to  0.000000
2/4/2011	10:08:51 AM	H2 MFC set to  500.000000
2/4/2011	10:08:51 AM	BCl3 MFC set to  0.000000
2/4/2011	10:08:51 AM	PHl3 MFC set to  0.000000
2/4/2011	10:08:51 AM	SiCl4 MFC set to  50.000000
2/4/2011	10:08:51 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	10:08:51 AM	Tube furnace set to 1000
2/4/2011	10:09:01 AM	Helium valve closed
2/4/2011	10:09:01 AM	PH3 valve closed
2/4/2011	10:09:01 AM	Main Vac valve closed
2/4/2011	10:09:01 AM	Bypass valve closed
2/4/2011	10:09:01 AM	H2 valve opened
2/4/2011	10:09:01 AM	BCl3 valve opened
2/4/2011	10:09:01 AM	SiCl4 pre valve opened
2/4/2011	10:09:01 AM	SiCl4 post valve opened
2/4/2011	10:09:01 AM	Bubbler valve opened
2/4/2011	10:09:01 AM	Helium MFC set to  0.000000
2/4/2011	10:09:01 AM	H2 MFC set to  500.000000
2/4/2011	10:09:01 AM	BCl3 MFC set to  5.000000
2/4/2011	10:09:01 AM	PHl3 MFC set to  0.000000
2/4/2011	10:09:01 AM	SiCl4 MFC set to  50.000000
2/4/2011	10:09:01 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	10:09:02 AM	Tube furnace set to 1000
2/4/2011	10:29:02 AM	H2 valve closed
2/4/2011	10:29:02 AM	BCl3 valve closed
2/4/2011	10:29:02 AM	PH3 valve closed
2/4/2011	10:29:02 AM	SiCl4 pre valve closed
2/4/2011	10:29:02 AM	SiCl4 post valve closed
2/4/2011	10:29:02 AM	Main Vac valve closed
2/4/2011	10:29:02 AM	Bypass valve closed
2/4/2011	10:29:02 AM	Helium valve opened
2/4/2011	10:29:02 AM	Bubbler valve opened
2/4/2011	10:29:02 AM	Helium MFC set to  500.000000
2/4/2011	10:29:02 AM	H2 MFC set to  0.000000
2/4/2011	10:29:02 AM	BCl3 MFC set to  0.000000
2/4/2011	10:29:02 AM	PHl3 MFC set to  0.000000
2/4/2011	10:29:02 AM	SiCl4 MFC set to  0.000000
2/4/2011	10:29:02 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	10:29:02 AM	Tube furnace set to 0
2/4/2011	10:49:02 AM	Helium valve closed
2/4/2011	10:49:02 AM	H2 valve closed
2/4/2011	10:49:02 AM	BCl3 valve closed
2/4/2011	10:49:02 AM	PH3 valve closed
2/4/2011	10:49:02 AM	SiCl4 pre valve closed
2/4/2011	10:49:02 AM	SiCl4 post valve closed
2/4/2011	10:49:02 AM	Main Vac valve closed
2/4/2011	10:49:02 AM	Bypass valve closed
2/4/2011	10:49:02 AM	Bubbler valve closed
2/4/2011	10:49:02 AM	Helium MFC set to  0.000000
2/4/2011	10:49:02 AM	H2 MFC set to  0.000000
2/4/2011	10:49:02 AM	BCl3 MFC set to  0.000000
2/4/2011	10:49:02 AM	PHl3 MFC set to  0.000000
2/4/2011	10:49:02 AM	SiCl4 MFC set to  0.000000
2/4/2011	10:49:02 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	10:49:02 AM	Tube furnace set to 0
2/4/2011	10:49:02 AM	Run finished at 10:49 AM
2/4/2011	10:55:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	10:55:57 AM	Recipe started at 10:55 AM
2/4/2011	10:55:57 AM	H2 valve closed
2/4/2011	10:55:57 AM	BCl3 valve closed
2/4/2011	10:55:57 AM	PH3 valve closed
2/4/2011	10:55:57 AM	SiCl4 pre valve closed
2/4/2011	10:55:57 AM	SiCl4 post valve closed
2/4/2011	10:55:57 AM	Main Vac valve closed
2/4/2011	10:55:57 AM	Bypass valve closed
2/4/2011	10:55:57 AM	Bubbler valve closed
2/4/2011	10:55:57 AM	Helium valve opened
2/4/2011	10:55:57 AM	Helium MFC set to  500.000000
2/4/2011	10:55:57 AM	H2 MFC set to  0.000000
2/4/2011	10:55:57 AM	BCl3 MFC set to  0.000000
2/4/2011	10:55:57 AM	PHl3 MFC set to  0.000000
2/4/2011	10:55:57 AM	SiCl4 MFC set to  0.000000
2/4/2011	10:55:57 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	10:55:57 AM	Tube furnace set to 0
2/4/2011	10:56:01 AM	Helium valve closed
2/4/2011	10:56:01 AM	H2 valve closed
2/4/2011	10:56:01 AM	BCl3 valve closed
2/4/2011	10:56:01 AM	PH3 valve closed
2/4/2011	10:56:01 AM	SiCl4 pre valve closed
2/4/2011	10:56:01 AM	SiCl4 post valve closed
2/4/2011	10:56:01 AM	Main Vac valve closed
2/4/2011	10:56:01 AM	Bypass valve closed
2/4/2011	10:56:01 AM	Bubbler valve closed
2/4/2011	10:56:01 AM	Helium MFC set to  0.000000
2/4/2011	10:56:01 AM	H2 MFC set to  0.000000
2/4/2011	10:56:01 AM	BCl3 MFC set to  0.000000
2/4/2011	10:56:01 AM	PHl3 MFC set to  0.000000
2/4/2011	10:56:01 AM	SiCl4 MFC set to  0.000000
2/4/2011	10:56:01 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	10:56:01 AM	Tube furnace set to 0
2/4/2011	10:56:01 AM	Run finished at 10:56 AM
2/4/2011	10:56:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	10:59:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	10:59:40 AM	Recipe started at 10:59 AM
2/4/2011	10:59:40 AM	Helium valve closed
2/4/2011	10:59:40 AM	H2 valve closed
2/4/2011	10:59:40 AM	BCl3 valve closed
2/4/2011	10:59:40 AM	PH3 valve closed
2/4/2011	10:59:40 AM	SiCl4 pre valve closed
2/4/2011	10:59:40 AM	SiCl4 post valve closed
2/4/2011	10:59:40 AM	Main Vac valve closed
2/4/2011	10:59:40 AM	Bubbler valve closed
2/4/2011	10:59:40 AM	Bypass valve opened
2/4/2011	10:59:40 AM	Helium MFC set to  0.000000
2/4/2011	10:59:40 AM	H2 MFC set to  0.000000
2/4/2011	10:59:40 AM	BCl3 MFC set to  0.000000
2/4/2011	10:59:40 AM	PHl3 MFC set to  0.000000
2/4/2011	10:59:40 AM	SiCl4 MFC set to  0.000000
2/4/2011	10:59:40 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	10:59:40 AM	Tube furnace set to 0
2/4/2011	11:00:11 AM	Helium valve closed
2/4/2011	11:00:11 AM	H2 valve closed
2/4/2011	11:00:11 AM	BCl3 valve closed
2/4/2011	11:00:11 AM	PH3 valve closed
2/4/2011	11:00:11 AM	SiCl4 pre valve closed
2/4/2011	11:00:11 AM	SiCl4 post valve closed
2/4/2011	11:00:11 AM	Bubbler valve closed
2/4/2011	11:00:11 AM	Main Vac valve opened
2/4/2011	11:00:11 AM	Bypass valve opened
2/4/2011	11:00:11 AM	Helium MFC set to  0.000000
2/4/2011	11:00:11 AM	H2 MFC set to  0.000000
2/4/2011	11:00:11 AM	BCl3 MFC set to  0.000000
2/4/2011	11:00:11 AM	PHl3 MFC set to  0.000000
2/4/2011	11:00:11 AM	SiCl4 MFC set to  0.000000
2/4/2011	11:00:11 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	11:00:11 AM	Tube furnace set to 0
2/4/2011	11:00:12 AM	Run finished at 11:00 AM
2/4/2011	11:00:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	11:11:23 AM	Helium MFC set to  100.000000
2/4/2011	11:11:25 AM	Helium valve opened
2/4/2011	11:12:00 AM	Helium valve closed
2/4/2011	11:12:32 AM	Helium valve opened
2/4/2011	11:14:28 AM	Helium valve closed
2/4/2011	11:15:39 AM	Helium valve opened
2/4/2011	11:16:49 AM	Helium valve closed
2/4/2011	11:16:50 AM	Helium valve opened
2/4/2011	11:16:50 AM	Helium valve closed
2/4/2011	11:17:44 AM	Helium valve opened
2/4/2011	11:18:30 AM	Helium valve closed
2/4/2011	11:18:33 AM	Helium MFC set to  0.000000
2/4/2011	11:18:34 AM	Helium valve opened
2/4/2011	11:18:35 AM	Helium valve closed
2/4/2011	11:30:24 AM	Helium MFC set to  70.000000
2/4/2011	11:30:26 AM	Helium valve opened
2/4/2011	11:30:51 AM	Helium MFC set to  0.000000
2/4/2011	11:30:52 AM	Helium valve closed
2/4/2011	11:31:36 AM	Main Vac valve closed
2/4/2011	11:31:37 AM	Bypass valve closed
2/4/2011	11:31:45 AM	Bypass valve opened
2/4/2011	11:31:46 AM	Main Vac valve opened
2/4/2011	11:31:50 AM	Helium MFC set to  70.000000
2/4/2011	11:31:55 AM	Helium valve opened
2/4/2011	11:32:37 AM	Helium MFC set to  0.000000
2/4/2011	11:32:38 AM	Helium valve closed
2/4/2011	11:35:28 AM	Recipe started at 11:35 AM
2/4/2011	11:35:28 AM	Helium valve closed
2/4/2011	11:35:28 AM	BCl3 valve closed
2/4/2011	11:35:28 AM	PH3 valve closed
2/4/2011	11:35:28 AM	SiCl4 pre valve closed
2/4/2011	11:35:28 AM	SiCl4 post valve closed
2/4/2011	11:35:28 AM	Main Vac valve closed
2/4/2011	11:35:28 AM	Bypass valve closed
2/4/2011	11:35:28 AM	Bubbler valve closed
2/4/2011	11:35:28 AM	H2 valve opened
2/4/2011	11:35:28 AM	Helium MFC set to  0.000000
2/4/2011	11:35:28 AM	H2 MFC set to  500.000000
2/4/2011	11:35:28 AM	BCl3 MFC set to  0.000000
2/4/2011	11:35:28 AM	PHl3 MFC set to  0.000000
2/4/2011	11:35:28 AM	SiCl4 MFC set to  0.000000
2/4/2011	11:35:28 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	11:35:28 AM	Tube furnace set to 200
2/4/2011	11:36:45 AM	Helium valve closed
2/4/2011	11:36:45 AM	BCl3 valve closed
2/4/2011	11:36:45 AM	PH3 valve closed
2/4/2011	11:36:45 AM	SiCl4 pre valve closed
2/4/2011	11:36:45 AM	SiCl4 post valve closed
2/4/2011	11:36:45 AM	Main Vac valve closed
2/4/2011	11:36:45 AM	Bypass valve closed
2/4/2011	11:36:45 AM	H2 valve opened
2/4/2011	11:36:45 AM	Bubbler valve opened
2/4/2011	11:36:45 AM	Helium MFC set to  0.000000
2/4/2011	11:36:45 AM	H2 MFC set to  400.000000
2/4/2011	11:36:45 AM	BCl3 MFC set to  0.000000
2/4/2011	11:36:45 AM	PHl3 MFC set to  0.000000
2/4/2011	11:36:45 AM	SiCl4 MFC set to  0.000000
2/4/2011	11:36:45 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	11:36:45 AM	Tube furnace set to 1001
2/4/2011	11:57:45 AM	Helium valve closed
2/4/2011	11:57:45 AM	BCl3 valve closed
2/4/2011	11:57:45 AM	PH3 valve closed
2/4/2011	11:57:45 AM	Main Vac valve closed
2/4/2011	11:57:45 AM	Bypass valve closed
2/4/2011	11:57:45 AM	H2 valve opened
2/4/2011	11:57:45 AM	SiCl4 pre valve opened
2/4/2011	11:57:45 AM	SiCl4 post valve opened
2/4/2011	11:57:45 AM	Bubbler valve opened
2/4/2011	11:57:45 AM	Helium MFC set to  0.000000
2/4/2011	11:57:45 AM	H2 MFC set to  500.000000
2/4/2011	11:57:45 AM	BCl3 MFC set to  0.000000
2/4/2011	11:57:45 AM	PHl3 MFC set to  0.000000
2/4/2011	11:57:45 AM	SiCl4 MFC set to  50.000000
2/4/2011	11:57:45 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	11:57:45 AM	Tube furnace set to 1000
2/4/2011	11:57:55 AM	Helium valve closed
2/4/2011	11:57:55 AM	PH3 valve closed
2/4/2011	11:57:55 AM	Main Vac valve closed
2/4/2011	11:57:55 AM	Bypass valve closed
2/4/2011	11:57:55 AM	H2 valve opened
2/4/2011	11:57:55 AM	BCl3 valve opened
2/4/2011	11:57:55 AM	SiCl4 pre valve opened
2/4/2011	11:57:55 AM	SiCl4 post valve opened
2/4/2011	11:57:55 AM	Bubbler valve opened
2/4/2011	11:57:55 AM	Helium MFC set to  0.000000
2/4/2011	11:57:55 AM	H2 MFC set to  400.000000
2/4/2011	11:57:55 AM	BCl3 MFC set to  4.000000
2/4/2011	11:57:55 AM	PHl3 MFC set to  0.000000
2/4/2011	11:57:55 AM	SiCl4 MFC set to  40.000000
2/4/2011	11:57:55 AM	Bypass solenoid MFC set to  0.000000
2/4/2011	11:57:56 AM	Tube furnace set to 1000
2/4/2011	12:17:56 PM	H2 valve closed
2/4/2011	12:17:56 PM	BCl3 valve closed
2/4/2011	12:17:56 PM	PH3 valve closed
2/4/2011	12:17:56 PM	SiCl4 pre valve closed
2/4/2011	12:17:56 PM	SiCl4 post valve closed
2/4/2011	12:17:56 PM	Main Vac valve closed
2/4/2011	12:17:56 PM	Bypass valve closed
2/4/2011	12:17:56 PM	Helium valve opened
2/4/2011	12:17:56 PM	Bubbler valve opened
2/4/2011	12:17:56 PM	Helium MFC set to  500.000000
2/4/2011	12:17:56 PM	H2 MFC set to  0.000000
2/4/2011	12:17:56 PM	BCl3 MFC set to  0.000000
2/4/2011	12:17:56 PM	PHl3 MFC set to  0.000000
2/4/2011	12:17:56 PM	SiCl4 MFC set to  0.000000
2/4/2011	12:17:56 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:17:56 PM	Tube furnace set to 0
2/4/2011	12:37:56 PM	Helium valve closed
2/4/2011	12:37:56 PM	H2 valve closed
2/4/2011	12:37:56 PM	BCl3 valve closed
2/4/2011	12:37:56 PM	PH3 valve closed
2/4/2011	12:37:56 PM	SiCl4 pre valve closed
2/4/2011	12:37:56 PM	SiCl4 post valve closed
2/4/2011	12:37:56 PM	Main Vac valve closed
2/4/2011	12:37:56 PM	Bypass valve closed
2/4/2011	12:37:56 PM	Bubbler valve closed
2/4/2011	12:37:56 PM	Helium MFC set to  0.000000
2/4/2011	12:37:56 PM	H2 MFC set to  0.000000
2/4/2011	12:37:56 PM	BCl3 MFC set to  0.000000
2/4/2011	12:37:56 PM	PHl3 MFC set to  0.000000
2/4/2011	12:37:56 PM	SiCl4 MFC set to  0.000000
2/4/2011	12:37:56 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:37:56 PM	Tube furnace set to 0
2/4/2011	12:37:56 PM	Run finished at 12:37 PM
2/4/2011	12:49:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	12:49:11 PM	Recipe started at 12:49 PM
2/4/2011	12:49:11 PM	H2 valve closed
2/4/2011	12:49:11 PM	BCl3 valve closed
2/4/2011	12:49:11 PM	PH3 valve closed
2/4/2011	12:49:11 PM	SiCl4 pre valve closed
2/4/2011	12:49:11 PM	SiCl4 post valve closed
2/4/2011	12:49:11 PM	Main Vac valve closed
2/4/2011	12:49:11 PM	Bypass valve closed
2/4/2011	12:49:11 PM	Bubbler valve closed
2/4/2011	12:49:11 PM	Helium valve opened
2/4/2011	12:49:11 PM	Helium MFC set to  500.000000
2/4/2011	12:49:11 PM	H2 MFC set to  0.000000
2/4/2011	12:49:11 PM	BCl3 MFC set to  0.000000
2/4/2011	12:49:11 PM	PHl3 MFC set to  0.000000
2/4/2011	12:49:11 PM	SiCl4 MFC set to  0.000000
2/4/2011	12:49:11 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:49:11 PM	Tube furnace set to 0
2/4/2011	12:49:16 PM	Helium valve closed
2/4/2011	12:49:16 PM	H2 valve closed
2/4/2011	12:49:16 PM	BCl3 valve closed
2/4/2011	12:49:16 PM	PH3 valve closed
2/4/2011	12:49:16 PM	SiCl4 pre valve closed
2/4/2011	12:49:16 PM	SiCl4 post valve closed
2/4/2011	12:49:16 PM	Main Vac valve closed
2/4/2011	12:49:16 PM	Bypass valve closed
2/4/2011	12:49:16 PM	Bubbler valve closed
2/4/2011	12:49:16 PM	Helium MFC set to  0.000000
2/4/2011	12:49:16 PM	H2 MFC set to  0.000000
2/4/2011	12:49:16 PM	BCl3 MFC set to  0.000000
2/4/2011	12:49:16 PM	PHl3 MFC set to  0.000000
2/4/2011	12:49:16 PM	SiCl4 MFC set to  0.000000
2/4/2011	12:49:16 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:49:16 PM	Tube furnace set to 0
2/4/2011	12:49:17 PM	Run finished at 12:49 PM
2/4/2011	12:49:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	12:53:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	12:53:47 PM	Recipe started at 12:53 PM
2/4/2011	12:53:47 PM	Helium valve closed
2/4/2011	12:53:47 PM	H2 valve closed
2/4/2011	12:53:47 PM	BCl3 valve closed
2/4/2011	12:53:47 PM	PH3 valve closed
2/4/2011	12:53:47 PM	SiCl4 pre valve closed
2/4/2011	12:53:47 PM	SiCl4 post valve closed
2/4/2011	12:53:47 PM	Main Vac valve closed
2/4/2011	12:53:47 PM	Bubbler valve closed
2/4/2011	12:53:47 PM	Bypass valve opened
2/4/2011	12:53:47 PM	Helium MFC set to  0.000000
2/4/2011	12:53:47 PM	H2 MFC set to  0.000000
2/4/2011	12:53:47 PM	BCl3 MFC set to  0.000000
2/4/2011	12:53:47 PM	PHl3 MFC set to  0.000000
2/4/2011	12:53:47 PM	SiCl4 MFC set to  0.000000
2/4/2011	12:53:47 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:53:48 PM	Tube furnace set to 0
2/4/2011	12:54:20 PM	Helium valve closed
2/4/2011	12:54:20 PM	H2 valve closed
2/4/2011	12:54:20 PM	BCl3 valve closed
2/4/2011	12:54:20 PM	PH3 valve closed
2/4/2011	12:54:20 PM	SiCl4 pre valve closed
2/4/2011	12:54:20 PM	SiCl4 post valve closed
2/4/2011	12:54:20 PM	Bubbler valve closed
2/4/2011	12:54:20 PM	Main Vac valve opened
2/4/2011	12:54:20 PM	Bypass valve opened
2/4/2011	12:54:20 PM	Helium MFC set to  0.000000
2/4/2011	12:54:20 PM	H2 MFC set to  0.000000
2/4/2011	12:54:20 PM	BCl3 MFC set to  0.000000
2/4/2011	12:54:20 PM	PHl3 MFC set to  0.000000
2/4/2011	12:54:20 PM	SiCl4 MFC set to  0.000000
2/4/2011	12:54:20 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	12:54:20 PM	Tube furnace set to 0
2/4/2011	12:54:20 PM	Run finished at 12:54 PM
2/4/2011	12:54:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	1:08:55 PM	Helium MFC set to  70.000000
2/4/2011	1:08:56 PM	Helium valve opened
2/4/2011	1:11:40 PM	Helium MFC set to  0.000000
2/4/2011	1:11:41 PM	Helium valve closed
2/4/2011	1:12:21 PM	Helium MFC set to  50.000000
2/4/2011	1:12:21 PM	Helium valve opened
2/4/2011	1:17:08 PM	Helium valve closed
2/4/2011	1:17:11 PM	Helium MFC set to  0.000000
2/4/2011	1:18:11 PM	Helium MFC set to  100.000000
2/4/2011	1:18:14 PM	Helium valve opened
2/4/2011	1:18:17 PM	Helium valve closed
2/4/2011	1:18:20 PM	Helium MFC set to  0.000000
2/4/2011	1:19:17 PM	Recipe started at 1:19 PM
2/4/2011	1:19:17 PM	Helium valve closed
2/4/2011	1:19:17 PM	BCl3 valve closed
2/4/2011	1:19:17 PM	PH3 valve closed
2/4/2011	1:19:17 PM	SiCl4 pre valve closed
2/4/2011	1:19:17 PM	SiCl4 post valve closed
2/4/2011	1:19:17 PM	Main Vac valve closed
2/4/2011	1:19:17 PM	Bypass valve closed
2/4/2011	1:19:17 PM	Bubbler valve closed
2/4/2011	1:19:17 PM	H2 valve opened
2/4/2011	1:19:17 PM	Helium MFC set to  0.000000
2/4/2011	1:19:17 PM	H2 MFC set to  500.000000
2/4/2011	1:19:17 PM	BCl3 MFC set to  0.000000
2/4/2011	1:19:17 PM	PHl3 MFC set to  0.000000
2/4/2011	1:19:17 PM	SiCl4 MFC set to  0.000000
2/4/2011	1:19:17 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:19:18 PM	Tube furnace set to 200
2/4/2011	1:20:36 PM	Helium valve closed
2/4/2011	1:20:36 PM	BCl3 valve closed
2/4/2011	1:20:36 PM	PH3 valve closed
2/4/2011	1:20:36 PM	SiCl4 pre valve closed
2/4/2011	1:20:36 PM	SiCl4 post valve closed
2/4/2011	1:20:36 PM	Main Vac valve closed
2/4/2011	1:20:36 PM	Bypass valve closed
2/4/2011	1:20:36 PM	H2 valve opened
2/4/2011	1:20:36 PM	Bubbler valve opened
2/4/2011	1:20:36 PM	Helium MFC set to  0.000000
2/4/2011	1:20:36 PM	H2 MFC set to  400.000000
2/4/2011	1:20:36 PM	BCl3 MFC set to  0.000000
2/4/2011	1:20:36 PM	PHl3 MFC set to  0.000000
2/4/2011	1:20:36 PM	SiCl4 MFC set to  0.000000
2/4/2011	1:20:36 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:20:36 PM	Tube furnace set to 1001
2/4/2011	1:41:36 PM	Helium valve closed
2/4/2011	1:41:36 PM	BCl3 valve closed
2/4/2011	1:41:36 PM	PH3 valve closed
2/4/2011	1:41:36 PM	Main Vac valve closed
2/4/2011	1:41:36 PM	Bypass valve closed
2/4/2011	1:41:36 PM	H2 valve opened
2/4/2011	1:41:36 PM	SiCl4 pre valve opened
2/4/2011	1:41:36 PM	SiCl4 post valve opened
2/4/2011	1:41:36 PM	Bubbler valve opened
2/4/2011	1:41:36 PM	Helium MFC set to  0.000000
2/4/2011	1:41:36 PM	H2 MFC set to  500.000000
2/4/2011	1:41:36 PM	BCl3 MFC set to  0.000000
2/4/2011	1:41:36 PM	PHl3 MFC set to  0.000000
2/4/2011	1:41:36 PM	SiCl4 MFC set to  50.000000
2/4/2011	1:41:36 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:41:36 PM	Tube furnace set to 1000
2/4/2011	1:41:46 PM	Helium valve closed
2/4/2011	1:41:46 PM	PH3 valve closed
2/4/2011	1:41:46 PM	Main Vac valve closed
2/4/2011	1:41:46 PM	Bypass valve closed
2/4/2011	1:41:46 PM	H2 valve opened
2/4/2011	1:41:46 PM	BCl3 valve opened
2/4/2011	1:41:46 PM	SiCl4 pre valve opened
2/4/2011	1:41:46 PM	SiCl4 post valve opened
2/4/2011	1:41:46 PM	Bubbler valve opened
2/4/2011	1:41:46 PM	Helium MFC set to  0.000000
2/4/2011	1:41:46 PM	H2 MFC set to  400.000000
2/4/2011	1:41:46 PM	BCl3 MFC set to  4.000000
2/4/2011	1:41:46 PM	PHl3 MFC set to  0.000000
2/4/2011	1:41:46 PM	SiCl4 MFC set to  40.000000
2/4/2011	1:41:46 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	1:41:46 PM	Tube furnace set to 1000
2/4/2011	2:01:46 PM	H2 valve closed
2/4/2011	2:01:46 PM	BCl3 valve closed
2/4/2011	2:01:46 PM	PH3 valve closed
2/4/2011	2:01:46 PM	SiCl4 pre valve closed
2/4/2011	2:01:46 PM	SiCl4 post valve closed
2/4/2011	2:01:46 PM	Main Vac valve closed
2/4/2011	2:01:46 PM	Bypass valve closed
2/4/2011	2:01:46 PM	Helium valve opened
2/4/2011	2:01:46 PM	Bubbler valve opened
2/4/2011	2:01:46 PM	Helium MFC set to  500.000000
2/4/2011	2:01:46 PM	H2 MFC set to  0.000000
2/4/2011	2:01:46 PM	BCl3 MFC set to  0.000000
2/4/2011	2:01:46 PM	PHl3 MFC set to  0.000000
2/4/2011	2:01:46 PM	SiCl4 MFC set to  0.000000
2/4/2011	2:01:46 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:01:46 PM	Tube furnace set to 0
2/4/2011	2:26:46 PM	Helium valve closed
2/4/2011	2:26:46 PM	H2 valve closed
2/4/2011	2:26:46 PM	BCl3 valve closed
2/4/2011	2:26:46 PM	PH3 valve closed
2/4/2011	2:26:46 PM	SiCl4 pre valve closed
2/4/2011	2:26:46 PM	SiCl4 post valve closed
2/4/2011	2:26:46 PM	Main Vac valve closed
2/4/2011	2:26:46 PM	Bypass valve closed
2/4/2011	2:26:46 PM	Bubbler valve closed
2/4/2011	2:26:46 PM	Helium MFC set to  0.000000
2/4/2011	2:26:46 PM	H2 MFC set to  0.000000
2/4/2011	2:26:46 PM	BCl3 MFC set to  0.000000
2/4/2011	2:26:46 PM	PHl3 MFC set to  0.000000
2/4/2011	2:26:46 PM	SiCl4 MFC set to  0.000000
2/4/2011	2:26:46 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:26:46 PM	Tube furnace set to 0
2/4/2011	2:26:47 PM	Run finished at 2:26 PM
2/4/2011	2:49:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	2:49:10 PM	Recipe started at 2:49 PM
2/4/2011	2:49:10 PM	H2 valve closed
2/4/2011	2:49:10 PM	BCl3 valve closed
2/4/2011	2:49:10 PM	PH3 valve closed
2/4/2011	2:49:10 PM	SiCl4 pre valve closed
2/4/2011	2:49:10 PM	SiCl4 post valve closed
2/4/2011	2:49:10 PM	Main Vac valve closed
2/4/2011	2:49:10 PM	Bypass valve closed
2/4/2011	2:49:10 PM	Bubbler valve closed
2/4/2011	2:49:10 PM	Helium valve opened
2/4/2011	2:49:10 PM	Helium MFC set to  500.000000
2/4/2011	2:49:10 PM	H2 MFC set to  0.000000
2/4/2011	2:49:10 PM	BCl3 MFC set to  0.000000
2/4/2011	2:49:10 PM	PHl3 MFC set to  0.000000
2/4/2011	2:49:10 PM	SiCl4 MFC set to  0.000000
2/4/2011	2:49:10 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:49:10 PM	Tube furnace set to 0
2/4/2011	2:49:11 PM	Helium valve closed
2/4/2011	2:49:11 PM	H2 valve closed
2/4/2011	2:49:11 PM	BCl3 valve closed
2/4/2011	2:49:11 PM	PH3 valve closed
2/4/2011	2:49:11 PM	SiCl4 pre valve closed
2/4/2011	2:49:11 PM	SiCl4 post valve closed
2/4/2011	2:49:11 PM	Main Vac valve closed
2/4/2011	2:49:11 PM	Bypass valve closed
2/4/2011	2:49:11 PM	Bubbler valve closed
2/4/2011	2:49:11 PM	Helium MFC set to  0.000000
2/4/2011	2:49:11 PM	H2 MFC set to  0.000000
2/4/2011	2:49:11 PM	BCl3 MFC set to  0.000000
2/4/2011	2:49:11 PM	PHl3 MFC set to  0.000000
2/4/2011	2:49:11 PM	SiCl4 MFC set to  0.000000
2/4/2011	2:49:11 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:49:11 PM	Tube furnace set to 0
2/4/2011	2:49:11 PM	Run finished at 2:49 PM
2/4/2011	2:49:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	2:58:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	2:58:31 PM	Recipe started at 2:58 PM
2/4/2011	2:58:31 PM	H2 valve closed
2/4/2011	2:58:31 PM	BCl3 valve closed
2/4/2011	2:58:31 PM	PH3 valve closed
2/4/2011	2:58:31 PM	SiCl4 pre valve closed
2/4/2011	2:58:31 PM	SiCl4 post valve closed
2/4/2011	2:58:31 PM	Main Vac valve closed
2/4/2011	2:58:31 PM	Bypass valve closed
2/4/2011	2:58:31 PM	Bubbler valve closed
2/4/2011	2:58:31 PM	Helium valve opened
2/4/2011	2:58:31 PM	Helium MFC set to  500.000000
2/4/2011	2:58:31 PM	H2 MFC set to  0.000000
2/4/2011	2:58:31 PM	BCl3 MFC set to  0.000000
2/4/2011	2:58:31 PM	PHl3 MFC set to  0.000000
2/4/2011	2:58:31 PM	SiCl4 MFC set to  0.000000
2/4/2011	2:58:31 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:58:31 PM	Tube furnace set to 0
2/4/2011	2:58:35 PM	Helium valve closed
2/4/2011	2:58:35 PM	H2 valve closed
2/4/2011	2:58:35 PM	BCl3 valve closed
2/4/2011	2:58:35 PM	PH3 valve closed
2/4/2011	2:58:35 PM	SiCl4 pre valve closed
2/4/2011	2:58:35 PM	SiCl4 post valve closed
2/4/2011	2:58:35 PM	Main Vac valve closed
2/4/2011	2:58:35 PM	Bypass valve closed
2/4/2011	2:58:35 PM	Bubbler valve closed
2/4/2011	2:58:35 PM	Helium MFC set to  0.000000
2/4/2011	2:58:35 PM	H2 MFC set to  0.000000
2/4/2011	2:58:35 PM	BCl3 MFC set to  0.000000
2/4/2011	2:58:35 PM	PHl3 MFC set to  0.000000
2/4/2011	2:58:35 PM	SiCl4 MFC set to  0.000000
2/4/2011	2:58:35 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	2:58:35 PM	Tube furnace set to 0
2/4/2011	2:58:35 PM	Run finished at 2:58 PM
2/4/2011	2:58:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	3:02:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	3:02:06 PM	Recipe started at 3:02 PM
2/4/2011	3:02:06 PM	Helium valve closed
2/4/2011	3:02:06 PM	H2 valve closed
2/4/2011	3:02:06 PM	BCl3 valve closed
2/4/2011	3:02:06 PM	PH3 valve closed
2/4/2011	3:02:06 PM	SiCl4 pre valve closed
2/4/2011	3:02:06 PM	SiCl4 post valve closed
2/4/2011	3:02:06 PM	Main Vac valve closed
2/4/2011	3:02:06 PM	Bubbler valve closed
2/4/2011	3:02:06 PM	Bypass valve opened
2/4/2011	3:02:06 PM	Helium MFC set to  0.000000
2/4/2011	3:02:06 PM	H2 MFC set to  0.000000
2/4/2011	3:02:06 PM	BCl3 MFC set to  0.000000
2/4/2011	3:02:06 PM	PHl3 MFC set to  0.000000
2/4/2011	3:02:06 PM	SiCl4 MFC set to  0.000000
2/4/2011	3:02:06 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:02:07 PM	Tube furnace set to 0
2/4/2011	3:02:39 PM	Helium valve closed
2/4/2011	3:02:39 PM	H2 valve closed
2/4/2011	3:02:39 PM	BCl3 valve closed
2/4/2011	3:02:39 PM	PH3 valve closed
2/4/2011	3:02:39 PM	SiCl4 pre valve closed
2/4/2011	3:02:39 PM	SiCl4 post valve closed
2/4/2011	3:02:39 PM	Bubbler valve closed
2/4/2011	3:02:39 PM	Main Vac valve opened
2/4/2011	3:02:39 PM	Bypass valve opened
2/4/2011	3:02:39 PM	Helium MFC set to  0.000000
2/4/2011	3:02:39 PM	H2 MFC set to  0.000000
2/4/2011	3:02:39 PM	BCl3 MFC set to  0.000000
2/4/2011	3:02:39 PM	PHl3 MFC set to  0.000000
2/4/2011	3:02:39 PM	SiCl4 MFC set to  0.000000
2/4/2011	3:02:39 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:02:39 PM	Tube furnace set to 0
2/4/2011	3:02:39 PM	Run finished at 3:02 PM
2/4/2011	3:02:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	3:02:54 PM	Helium MFC set to  50.000000
2/4/2011	3:02:55 PM	Helium valve opened
2/4/2011	3:03:17 PM	Helium valve closed
2/4/2011	3:03:20 PM	Helium MFC set to  0.000000
2/4/2011	3:03:51 PM	Helium MFC set to  60.000000
2/4/2011	3:03:52 PM	Helium valve opened
2/4/2011	3:03:58 PM	Helium valve closed
2/4/2011	3:04:11 PM	Helium valve opened
2/4/2011	3:04:20 PM	Helium valve closed
2/4/2011	3:26:42 PM	Helium valve opened
2/4/2011	3:27:05 PM	Helium valve closed
2/4/2011	3:28:28 PM	Helium valve opened
2/4/2011	3:29:05 PM	Helium valve closed
2/4/2011	3:30:03 PM	Helium valve opened
2/4/2011	3:31:41 PM	Helium valve closed
2/4/2011	3:32:33 PM	Main Vac valve closed
2/4/2011	3:32:35 PM	Bypass valve closed
2/4/2011	3:32:41 PM	Bypass valve opened
2/4/2011	3:32:42 PM	Main Vac valve opened
2/4/2011	3:32:44 PM	Helium valve opened
2/4/2011	3:33:39 PM	Helium valve closed
2/4/2011	3:33:41 PM	Helium MFC set to  0.000000
2/4/2011	3:34:44 PM	Recipe started at 3:34 PM
2/4/2011	3:34:44 PM	Helium valve closed
2/4/2011	3:34:44 PM	BCl3 valve closed
2/4/2011	3:34:44 PM	PH3 valve closed
2/4/2011	3:34:44 PM	SiCl4 pre valve closed
2/4/2011	3:34:44 PM	SiCl4 post valve closed
2/4/2011	3:34:44 PM	Main Vac valve closed
2/4/2011	3:34:44 PM	Bypass valve closed
2/4/2011	3:34:44 PM	Bubbler valve closed
2/4/2011	3:34:44 PM	H2 valve opened
2/4/2011	3:34:44 PM	Helium MFC set to  0.000000
2/4/2011	3:34:44 PM	H2 MFC set to  500.000000
2/4/2011	3:34:44 PM	BCl3 MFC set to  0.000000
2/4/2011	3:34:44 PM	PHl3 MFC set to  0.000000
2/4/2011	3:34:44 PM	SiCl4 MFC set to  0.000000
2/4/2011	3:34:44 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:34:44 PM	Tube furnace set to 200
2/4/2011	3:36:03 PM	Helium valve closed
2/4/2011	3:36:03 PM	BCl3 valve closed
2/4/2011	3:36:03 PM	PH3 valve closed
2/4/2011	3:36:03 PM	SiCl4 pre valve closed
2/4/2011	3:36:03 PM	SiCl4 post valve closed
2/4/2011	3:36:03 PM	Main Vac valve closed
2/4/2011	3:36:03 PM	Bypass valve closed
2/4/2011	3:36:03 PM	H2 valve opened
2/4/2011	3:36:03 PM	Bubbler valve opened
2/4/2011	3:36:03 PM	Helium MFC set to  0.000000
2/4/2011	3:36:03 PM	H2 MFC set to  400.000000
2/4/2011	3:36:03 PM	BCl3 MFC set to  0.000000
2/4/2011	3:36:03 PM	PHl3 MFC set to  0.000000
2/4/2011	3:36:03 PM	SiCl4 MFC set to  0.000000
2/4/2011	3:36:03 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:36:03 PM	Tube furnace set to 1001
2/4/2011	3:57:03 PM	Helium valve closed
2/4/2011	3:57:03 PM	BCl3 valve closed
2/4/2011	3:57:03 PM	PH3 valve closed
2/4/2011	3:57:03 PM	Main Vac valve closed
2/4/2011	3:57:03 PM	Bypass valve closed
2/4/2011	3:57:03 PM	H2 valve opened
2/4/2011	3:57:03 PM	SiCl4 pre valve opened
2/4/2011	3:57:03 PM	SiCl4 post valve opened
2/4/2011	3:57:03 PM	Bubbler valve opened
2/4/2011	3:57:03 PM	Helium MFC set to  0.000000
2/4/2011	3:57:03 PM	H2 MFC set to  450.000000
2/4/2011	3:57:03 PM	BCl3 MFC set to  0.000000
2/4/2011	3:57:03 PM	PHl3 MFC set to  0.000000
2/4/2011	3:57:03 PM	SiCl4 MFC set to  45.000000
2/4/2011	3:57:03 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:57:04 PM	Tube furnace set to 1000
2/4/2011	3:57:14 PM	Helium valve closed
2/4/2011	3:57:14 PM	PH3 valve closed
2/4/2011	3:57:14 PM	Main Vac valve closed
2/4/2011	3:57:14 PM	Bypass valve closed
2/4/2011	3:57:14 PM	H2 valve opened
2/4/2011	3:57:14 PM	BCl3 valve opened
2/4/2011	3:57:14 PM	SiCl4 pre valve opened
2/4/2011	3:57:14 PM	SiCl4 post valve opened
2/4/2011	3:57:14 PM	Bubbler valve opened
2/4/2011	3:57:14 PM	Helium MFC set to  0.000000
2/4/2011	3:57:14 PM	H2 MFC set to  450.000000
2/4/2011	3:57:14 PM	BCl3 MFC set to  4.500000
2/4/2011	3:57:14 PM	PHl3 MFC set to  0.000000
2/4/2011	3:57:14 PM	SiCl4 MFC set to  45.000000
2/4/2011	3:57:14 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	3:57:14 PM	Tube furnace set to 1000
2/4/2011	4:17:14 PM	H2 valve closed
2/4/2011	4:17:14 PM	BCl3 valve closed
2/4/2011	4:17:14 PM	PH3 valve closed
2/4/2011	4:17:14 PM	SiCl4 pre valve closed
2/4/2011	4:17:14 PM	SiCl4 post valve closed
2/4/2011	4:17:14 PM	Main Vac valve closed
2/4/2011	4:17:14 PM	Bypass valve closed
2/4/2011	4:17:14 PM	Helium valve opened
2/4/2011	4:17:14 PM	Bubbler valve opened
2/4/2011	4:17:14 PM	Helium MFC set to  400.000000
2/4/2011	4:17:14 PM	H2 MFC set to  0.000000
2/4/2011	4:17:14 PM	BCl3 MFC set to  0.000000
2/4/2011	4:17:14 PM	PHl3 MFC set to  0.000000
2/4/2011	4:17:14 PM	SiCl4 MFC set to  0.000000
2/4/2011	4:17:14 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	4:17:14 PM	Tube furnace set to 0
2/4/2011	4:42:14 PM	Helium valve closed
2/4/2011	4:42:14 PM	H2 valve closed
2/4/2011	4:42:14 PM	BCl3 valve closed
2/4/2011	4:42:14 PM	PH3 valve closed
2/4/2011	4:42:14 PM	SiCl4 pre valve closed
2/4/2011	4:42:14 PM	SiCl4 post valve closed
2/4/2011	4:42:14 PM	Main Vac valve closed
2/4/2011	4:42:14 PM	Bypass valve closed
2/4/2011	4:42:14 PM	Bubbler valve closed
2/4/2011	4:42:14 PM	Helium MFC set to  0.000000
2/4/2011	4:42:14 PM	H2 MFC set to  0.000000
2/4/2011	4:42:14 PM	BCl3 MFC set to  0.000000
2/4/2011	4:42:14 PM	PHl3 MFC set to  0.000000
2/4/2011	4:42:14 PM	SiCl4 MFC set to  0.000000
2/4/2011	4:42:14 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	4:42:14 PM	Tube furnace set to 0
2/4/2011	4:42:14 PM	Run finished at 4:42 PM
2/4/2011	5:21:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	5:21:50 PM	Recipe started at 5:21 PM
2/4/2011	5:21:50 PM	H2 valve closed
2/4/2011	5:21:50 PM	BCl3 valve closed
2/4/2011	5:21:50 PM	PH3 valve closed
2/4/2011	5:21:50 PM	SiCl4 pre valve closed
2/4/2011	5:21:50 PM	SiCl4 post valve closed
2/4/2011	5:21:50 PM	Main Vac valve closed
2/4/2011	5:21:50 PM	Bypass valve closed
2/4/2011	5:21:50 PM	Bubbler valve closed
2/4/2011	5:21:50 PM	Helium valve opened
2/4/2011	5:21:50 PM	Helium MFC set to  500.000000
2/4/2011	5:21:50 PM	H2 MFC set to  0.000000
2/4/2011	5:21:50 PM	BCl3 MFC set to  0.000000
2/4/2011	5:21:50 PM	PHl3 MFC set to  0.000000
2/4/2011	5:21:50 PM	SiCl4 MFC set to  0.000000
2/4/2011	5:21:50 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	5:21:50 PM	Tube furnace set to 0
2/4/2011	5:21:54 PM	Helium valve closed
2/4/2011	5:21:54 PM	H2 valve closed
2/4/2011	5:21:54 PM	BCl3 valve closed
2/4/2011	5:21:54 PM	PH3 valve closed
2/4/2011	5:21:54 PM	SiCl4 pre valve closed
2/4/2011	5:21:54 PM	SiCl4 post valve closed
2/4/2011	5:21:54 PM	Main Vac valve closed
2/4/2011	5:21:54 PM	Bypass valve closed
2/4/2011	5:21:54 PM	Bubbler valve closed
2/4/2011	5:21:54 PM	Helium MFC set to  0.000000
2/4/2011	5:21:54 PM	H2 MFC set to  0.000000
2/4/2011	5:21:54 PM	BCl3 MFC set to  0.000000
2/4/2011	5:21:54 PM	PHl3 MFC set to  0.000000
2/4/2011	5:21:54 PM	SiCl4 MFC set to  0.000000
2/4/2011	5:21:54 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	5:21:54 PM	Tube furnace set to 0
2/4/2011	5:21:55 PM	Run finished at 5:21 PM
2/4/2011	5:21:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/4/2011	5:23:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	5:23:47 PM	Recipe started at 5:23 PM
2/4/2011	5:23:47 PM	Helium valve closed
2/4/2011	5:23:47 PM	H2 valve closed
2/4/2011	5:23:47 PM	BCl3 valve closed
2/4/2011	5:23:47 PM	PH3 valve closed
2/4/2011	5:23:47 PM	SiCl4 pre valve closed
2/4/2011	5:23:47 PM	SiCl4 post valve closed
2/4/2011	5:23:47 PM	Main Vac valve closed
2/4/2011	5:23:47 PM	Bubbler valve closed
2/4/2011	5:23:47 PM	Bypass valve opened
2/4/2011	5:23:47 PM	Helium MFC set to  0.000000
2/4/2011	5:23:47 PM	H2 MFC set to  0.000000
2/4/2011	5:23:47 PM	BCl3 MFC set to  0.000000
2/4/2011	5:23:47 PM	PHl3 MFC set to  0.000000
2/4/2011	5:23:47 PM	SiCl4 MFC set to  0.000000
2/4/2011	5:23:47 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	5:23:48 PM	Tube furnace set to 0
2/4/2011	5:24:18 PM	Helium valve closed
2/4/2011	5:24:18 PM	H2 valve closed
2/4/2011	5:24:18 PM	BCl3 valve closed
2/4/2011	5:24:18 PM	PH3 valve closed
2/4/2011	5:24:18 PM	SiCl4 pre valve closed
2/4/2011	5:24:18 PM	SiCl4 post valve closed
2/4/2011	5:24:18 PM	Bubbler valve closed
2/4/2011	5:24:18 PM	Main Vac valve opened
2/4/2011	5:24:18 PM	Bypass valve opened
2/4/2011	5:24:18 PM	Helium MFC set to  0.000000
2/4/2011	5:24:18 PM	H2 MFC set to  0.000000
2/4/2011	5:24:18 PM	BCl3 MFC set to  0.000000
2/4/2011	5:24:18 PM	PHl3 MFC set to  0.000000
2/4/2011	5:24:18 PM	SiCl4 MFC set to  0.000000
2/4/2011	5:24:18 PM	Bypass solenoid MFC set to  0.000000
2/4/2011	5:24:18 PM	Tube furnace set to 0
2/4/2011	5:24:18 PM	Run finished at 5:24 PM
2/4/2011	5:24:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/4/2011	6:07:45 PM	H2 MFC set to  500.000000
2/4/2011	6:07:47 PM	H2 valve opened
2/4/2011	6:10:14 PM	H2 valve closed
2/4/2011	6:10:29 PM	H2 valve opened
2/4/2011	6:14:13 PM	H2 valve closed
2/4/2011	6:14:36 PM	H2 valve opened
2/4/2011	6:16:56 PM	H2 valve closed
2/4/2011	6:16:59 PM	H2 MFC set to  0.000000
